1997
DOI: 10.1088/0957-0233/8/3/006
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A three-axis goniometer in an UHV molecular beam experiment

Abstract: A sample manipulator with six degrees of freedom, which is part of a molecular beam scattering apparatus used to study gas - surface interactions, is described. Incidence parameters such as the angle of incidence and the azimuthal angle can be set and particles leaving the surface both in and out the plane of incidence can be measured (to within accuracy). The latter is achieved, under computer control, by a combination of the movement of the manipulator and the movement of the detector. Cooling of the sample… Show more

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Cited by 15 publications
(12 citation statements)
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“…The sample is mounted in the centre of the scattering chamber on a three-axis goniometer [54]. The main diagnostic tool is a differentially-pumped quadrupole mass spectrometer (QMS) that can be rotated around the sample to detect particles leaving from the surface along in-plane scattering directions.…”
Section: Methodsmentioning
confidence: 99%
“…The sample is mounted in the centre of the scattering chamber on a three-axis goniometer [54]. The main diagnostic tool is a differentially-pumped quadrupole mass spectrometer (QMS) that can be rotated around the sample to detect particles leaving from the surface along in-plane scattering directions.…”
Section: Methodsmentioning
confidence: 99%
“…69 A quadrupole mass spectrometer ͑QMS͒ can be rotated around the sample to detect the particles leaving the surface in the TOF experiment. Combining the movements of the manipulator and the rotatable QMS gives accurate control ͑by computer͒ over the incidence and exit angles of particles in the scattering experiment.…”
Section: Methodsmentioning
confidence: 99%
“…[34][35][36] It consisted of a cascaded arc plasma source mounted in a threestage differentially pumped beam line connected to a UHV scattering chamber with a base pressure of 2×10 −10 mbar. This chamber contained the sample, supported on a three-axis goniometer, 37 an ion sputter gun, a residual gas analyzer, and a differentially pumped rotatable quadrupole mass spectrometer (QMS). Ar (gas purity 99.999%) plasma was generated in the cascaded arc source.…”
Section: Methodsmentioning
confidence: 99%