2012
DOI: 10.1140/epjd/e2012-20647-x
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A thorough FT-IR spectroscopy study on micrometric silicon oxide films deposited by atmospheric pressure microwave plasma torch

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Cited by 25 publications
(17 citation statements)
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“… Assignment of vibrations is based on Yoshino et al (1990) , Faix (1991) , Gunde (2000) , Landreau et al (2012) , and Agarwal and Atalla (2016) . …”
Section: Resultsmentioning
confidence: 99%
“… Assignment of vibrations is based on Yoshino et al (1990) , Faix (1991) , Gunde (2000) , Landreau et al (2012) , and Agarwal and Atalla (2016) . …”
Section: Resultsmentioning
confidence: 99%
“…The peak frequency of the LO phonon gradually shifts to a higher frequency, from 1165 cm −1 to 1250 cm −1 , with decreasing oxide thickness, although the peak frequency of the TO phonon is independent of the oxide thickness. 13,17 Since the peak frequency of the TO phonon hardly depends on the oxide thickness, the large blue shift of only LO phonon cannot be explained with the following factors:…”
Section: Resultsmentioning
confidence: 99%
“…3,22,31 It has been reported that the cage-like structure can produce a microporous structure, leading to a lower lm density. 3,11,[51][52][53][54][55] Unfortunately, the formation of cages reduces the network cross-link density and it leads to a decrease in mechanical properties. 65,66 However, the region of suboxide Si-O 2 structures at 1030 cm À1 is dominant for the lms cured at 420 C (Fig.…”
Section: Papermentioning
confidence: 99%