A thin film multifunction sensor for harsh environments

Wrbanek, John D.; Fralick, Gustave C.; Martin, Lisa C.; Blaha, Charles

doi:10.2514/6.2001-3315

Cited by 17 publications

(9 citation statements)

References 4 publications

(3 reference statements)

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“…The results of the electrical characterization are summarized in table 3. The TCR values measured for the Ti-N films are in the same range as other materials used for strain gauges [4].…”

Section: B Electrical Characterizationmentioning

confidence: 88%

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Titanium Nitride as a Strain Gauge Material

Madsen

Hausladen

Chiriaev

et al. 2016

J. Microelectromech. Syst.

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The performance of titanium nitride (Ti-N) thin films deposited by reactive magnetron sputtering for use as a strain gauge material was investigated. Films of different composition ranging from pure titanium to over-stoichiometric Ti-N were prepared by varying the nitrogen flow to total flow ratio (α). The atomic composition was measured using Rutherford backscattering spectrometry and energy-dispersive X-ray spectroscopy. The structure of the films was studied using X-ray diffraction and scanning electron microscopy, revealing the formation of a columnar film morphology consisting of cubic-Ti-N grains with preferential crystal orientations depending on the flow ratio α. The stability of the film resistivity was studied at 200°C for 360 h. Films deposited at low (α ≤ 0.08) and high (α = 0.60) nitrogen flows exhibited a stable behavior relative to films deposited with intermediate nitrogen flows. The longitudinal piezoresistive gauge factor was found to increase with increasing nitrogen flow before settling at values of 6-6.35. Finally, the temperature coefficient of resistivity was found to be less than 300 ppm/°C for the films with the highest gauge factors. The results demonstrate that the Ti-N films have a good potential as a strain gauge material, especially due to the relatively high gauge factor.[ 2016-0040]Index Terms-Gauge factor, piezoresistivity, resistivity drift, temperature coefficient of resistivity (TCR), titanium nitride thin films, titanium thin film.

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“…The results of the electrical characterization are summarized in table 3. The TCR values measured for the Ti-N films are in the same range as other materials used for strain gauges [4].…”

Section: B Electrical Characterizationmentioning

confidence: 88%

“…Many compounds from the cermet class of materials have been investigated as strain gauge materials [4]. For example, titanium boride, titanium silicide, tantalum silicide and tungsten silicide were found to have gauge factors in the range 1.1 to 2.2 [5].…”

Section: Introductionmentioning

confidence: 99%

Titanium Nitride as a Strain Gauge Material

Madsen

Hausladen

Chiriaev

et al. 2016

J. Microelectromech. Syst.

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“…One example is a thin film multifunctional sensor that integrates into one "smart" sensor the designs of individual gauges that measure strain magnitudes and direction, heat flux, surface temperature, flow speed and direction. 15,[49][50] The entire gauge is microfabricated, enclosing a triangular area approximately 1.5 cm on a side with 50-μm-wide features. Designed for applications in material systems and engine components testing, the sensor can provide minimally intrusive characterization of advanced propulsion materials and components in hostile, high-temperature environments, validation of propulsion system design codes, and experimental verification of computational models.…”

Section: A Multiparameter Sensor Systemsmentioning

confidence: 99%

A Review of Exhaust Gas Temperature Sensing Techniques for Modern Turbine Engine Controls

Moll¹,

Behbahani²,

Fralick³

et al. 2014

50th AIAA/ASME/SAE/ASEE Joint Propulsion Conference

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The exhaust gas temperature (EGT) is typically defined as the gas temperature at the exit of the turbine; the sensors used to measure this parameter are considered the most vulnerable elements of the entire turbine engine instrumentation. EGT measurement is considered a key parameter for optimizing fuel economy, diagnosis, and prognosis. The reason is that turbine blade temperature is a good indicator for normal life consumption of that blade. Currently, direct sensor measurements made on turbine modules are limited due to the extremely hot environment. Exhaust gas temperature (EGT) sensors located downstream from the highest temperature sections provide a means to roughly infer the temperatures seen by the turbine blades/disks. But these sensors, which themselves are subject to frequent failures, provide a fairly inaccurate indication of the actual metal temperature profiles. This is of particular importance for high performance military turbine engines where the margin between hot-section operating conditions and material limitations is shrinking. A future state is envisioned that would use emerging pyrometric, fiber optic, and laser-based sensing to accurately assess the condition and life usage of the hot section, on a blade-by-blade basis. Nomenclature= speed of sound = acoustic constant = distance between transceivers in acoustic pyrometer = molecular weight of the gas = gas pressure = universal gas constant = gas temperature = time of flight of acoustic signal in acoustic pyrometer = heat capacity ratio of the gas = gas density

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“…So, exploring and developing alloy thin film used for high accuracy pressure sensor has extensive application prospect and can produce social benefits which make people attach importance to the study of sensor all over the world [3][4][5] .…”

Section: Introductionmentioning

confidence: 99%

Nano-sized thin films fabricated by ion beam sputtering and its properties

Zhou

Yan

Tian

2007

J. Wuhan Univ. Technol.-Mat. Sci. Edit.

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Nanoscale thick amorphous Ni-Cr alloy thin films were fabricated by low-energy ion beam sputtering technology; then the as-deposited samples experienced rapid thermal process to realize the transformation from amorphous to crystalline state. The film thickness was measured with α-stylus surface profiler, the structure and the compositions of the films were confirmed by low angle X-ray diffraction and scanning auger electron microprobe respectively, and the surface topography was characterized by scanning electron microscope and scanning probe microscope. Electrical property of the films was measured by fourpoint probe. The experimental results illustrate that the combined processes of ion beam sputtering and rapid thermal process are effective for fabrication nanoscale Ni-Cr alloy thin film with good properties.

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A thin film multifunction sensor for harsh environments

Abstract: The status of work at NASA Glenn Research Center to develop a minimally intrusive integrated sensor to provide real-time measurement of strain, heat flux and flow in high temperature

Cited by 17 publications

References 4 publications

Titanium Nitride as a Strain Gauge Material

Titanium Nitride as a Strain Gauge Material

A Review of Exhaust Gas Temperature Sensing Techniques for Modern Turbine Engine Controls

Nano-sized thin films fabricated by ion beam sputtering and its properties

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