A thermionic ionization gauge of high sensitivity employing a magnetic field

Conn, G. K. T.; Daglish, H.N.

doi:10.1088/0950-7671/31/11/308

Cited by 11 publications

(3 citation statements)

References 19 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…[1][2][3] A maximum ion current was obtained, approximately 10 4 times that observed in the absence of a magnetic field. (With this vacuum gauge, the maximum value was observed in the region of 0.05 T for an anode voltage of 1 kV.)…”

Section: Resultsmentioning

confidence: 99%

See 1 more Smart Citation

Nano- and Micro-Corrugations in Photo-Aligned Polymer Thin-Films; Correlations Between Topologies and Directional Light Scattering

Ibn‐Elhaj¹,

Schadt²

2003

Jpn. J. Appl. Phys.

View full text Add to dashboard Cite

A new sensitive type of magnetron gauge has been developed in order to obtain a linear response of ion current, I i , to pressure, P, with a high sensitivity over a wide range. The gauge is equipped with two ion collectors. The ratio of the ion currents of the two ion collectors is measured and kept constant by controlling the filament voltage, in order to keep the electric field constant within the anode over a wide range of pressure measurement. When a divergent-magnetic field is applied to this hot-cathode magnetron gauge, the slope of the plot of the filament voltage vs the ratio of the ion current of the two separate two ion collectors is improved from À0:28 to þ1:1{ þ 3:9 (V À1 ). When the diameters of the ion collectors were investigated, it was found that the current ratio ¼ 1 was attained when the outer diameters of the ion collectors were identical, and their inner diameters were 2 and 8 mm respectively. With this configuration, ion current was directly proportional to pressure in the range of 1 Â 10 À8 {1 Â 10 À4 Pa.

show abstract

Section: Resultsmentioning

confidence: 99%

“…1,2) Moreover, the anode current changes almost proportionally with pressure. It was found that the slope of a log { log plot of I i vs P was 41 in a U-shaped Lafferty-type magnetron VG and was 44 3,4) in another type of magnetron VG.…”

Section: Introductionmentioning

confidence: 98%

Nano- and Micro-Corrugations in Photo-Aligned Polymer Thin-Films; Correlations Between Topologies and Directional Light Scattering

Ibn‐Elhaj¹,

Schadt²

2003

Jpn. J. Appl. Phys.

View full text Add to dashboard Cite

show abstract

“…Other researches have also been performed on the high and low pressure limits aiming at having linear behaviour over a wide pressure range [62,63 ] and on the perturbations to the signal in hot cathode B-A gauges which contribute to errors of gauge measurement. With a B-A gauge pressures as low as 10-9 Pa may be detected.…”

Section: Short Historical Introductionmentioning

confidence: 99%