A theory for anomalous spectral behaviors observed in proton-enhanced microstrip inductors on silicon with its brief derivation

Liao, Chungpin; Chin-Wei, Liu; Hsu, Yu-Min; Duh, Ting-Shien

doi:10.1109/smtw.2002.1197414

Semiconductor Manufacturing Technology Workshop, 2002

DOI: 10.1109/smtw.2002.1197414

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A theory for anomalous spectral behaviors observed in proton-enhanced microstrip inductors on silicon with its brief derivation

Chungpin Liao¹,

Liu Chin-Wei²,

Yu-Min Hsu³

et al.

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A theory for anomalous spectral behaviors observed in proton-enhanced microstrip inductors on silicon with its brief derivation

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References 7 publications

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