A Theoretical Study on Static Gas Pressure Measurement via Circular Non-Touch Mode Capacitive Pressure Sensor
Ji Wu,
Xiao-Ting He,
Jun-Yi Sun
Abstract:A circular non-touch mode capacitive pressure sensor can operate in both transverse and normal uniform loading modes, but the elastic behavior of its movable electrode plate is different under the two different loading modes, making its input–output analytical relationships between pressure and capacitance different. This suggests that when such a sensor operates, respectively, in transverse and normal uniform loading modes, the theory of its numerical design and calibration is different, in other words, the t… Show more
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