“…Thin films are widely used in many engineering and technical fields, and most of these have good elastic deformation ability and can exhibit large elastic deflection under lateral loading [ 1 , 2 , 3 , 4 , 5 , 6 ], which provides the possibility for designing and developing thin film elastic deflection-based devices [ 7 , 8 , 9 , 10 , 11 , 12 , 13 , 14 ]. Among them, capacitive pressure sensors are a good example of physical quantity (pressure) detection by deflection measurement.…”