Abstract:Reliable and long-term operation of thin film bulk acoustic resonators (FBARs) under high power relies on the optimization of thermal resistance. In this work, thermal design strategies for high power FBARs are explored theoretically. For accurate estimation of the thermal characteristics of FBARs, the thermal conductivity of the AlN epilayer with temperature and thickness dependence is included in the finite element simulation model, of which AlN thermal conductivity is calculated through normal-process, Umkl… Show more
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