A test structure to verify the robustness of silicided N+/P+ interface

Lo, Cheng-Yao; Lin, Shieh-Shing; Chen, Wei-Ming; Mii, Y. J.

doi:10.1109/icmts.2004.1309473

Proceedings of the 2004 International Conference on Microelectronic Test Structures (IEEE Cat. No.04CH37516)

DOI: 10.1109/icmts.2004.1309473

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A test structure to verify the robustness of silicided N+/P+ interface

Cheng-Yao Lo

Shieh-Shing Lin

Wei-Ming Chen

et al.

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A test structure to verify the robustness of silicided N+/P+ interface

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References 2 publications

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