A Test Setup for the Characterization of Lorentz-Force MEMS Magnetometers

Sanchez-Chiva, Josep Maria; Valle, Juan; Fernandez, Daniel; Madrenas, Jordi

doi:10.1109/ojcas.2021.3099869

Cited by 2 publications

(2 citation statements)

References 36 publications

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“…Cavity pressure is a critical manufacturing figure, as it directly impacts the quality factor of the mechanical resonator, and hence, the magnetometer sensitivity, as shown by equation (12). Due to the complexity of the sensitivity experiments, a characterization platform was designed to simplify the test setup and ease the test operations of wafer-level unpackaged devices [78].…”

Section: Measurements and Resultsmentioning

confidence: 99%

Monolithic Sensor Integration in CMOS Technologies

Fernandez¹,

Michalik²,

Valle

et al. 2023

IEEE Sensors J.

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Besides being mainstream for mixed-signal electronics, CMOS technology can be used to integrate MEMS on a single die, taking advantage of the structures and materials available in feature sizes around 180 nm. In this article, we demonstrate that the CMOS Back End Of Line (BEOL) layers can be postprocessed and be opportunistically used to create several kinds of MEMS sensors exhibiting good or even excellent performance, such as accelerometers, pressure sensors and magnetometers. Despite the limitations of the available mechanical and material properties in CMOS technology, thanks to monolithic integration, these are compensated by the significant reduction of parasitics and system size. Furthermore, this work opens the path to create monolithic integrated multi-sensor (and even actuator) chips, including data fusion and intelligent processing.

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Section: Measurements and Resultsmentioning

confidence: 99%

Monolithic Sensor Integration in CMOS Technologies

Fernandez¹,

Michalik²,

Valle

et al. 2023

IEEE Sensors J.

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show abstract

“…To enhance measurement and modeling techniques, customized test setups are gaining increasing interest among circuit designers involved in interdisciplinary research. For example, [ 36 ] includes a measurement test setup to characterize Lorentz-force MEMS magnetometers. On the other hand, [ 37 ] describes the difficulties of collecting data involving measurements with flexible printed circuit boards (PCBs) for wearable healthcare monitoring applications.…”

Section: Introductionmentioning

confidence: 99%

Circuit-Level Modeling and Simulation of Wireless Sensing and Energy Harvesting With Hybrid Magnetoelectric Antennas for Implantable Neural Devices

Das

Nasrollahpour

et al. 2023

IEEE Open J. Circuits Syst.

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A magnetoelectric antenna (ME) can exhibit the dual capabilities of wireless energy harvesting and sensing at different frequencies. In this article, a behavioral circuit model for hybrid ME antennas is described to emulate the radio frequency (RF) energy harvesting and sensing operations during circuit simulations. The ME antenna of this work is interfaced with a CMOS energy harvester chip towards the goal of developing a wireless communication link for fully integrated implantable devices. One role of the integrated system is to receive pulsemodulated power from a nearby transmitter, and another role is to sense and transmit low-magnitude neural signals.The measurements reported in this paper are the first results that demonstrate simultaneous low-frequency wireless magnetic sensing and high-frequency wireless energy harvesting at two different frequencies with one dual-mode ME antenna. The proposed behavioral ME antenna model can be utilized during design optimizations of energy harvesting circuits. Measurements were performed to validate the wireless power transfer link with an ME antenna having a 2.57 GHz resonance frequency connected to an energy harvester chip designed in 65nm CMOS technology. Furthermore, this dual-mode ME antenna enables concurrent sensing using a carrier signal with a frequency that matches the second 63.63 MHz resonance mode. A wireless test platform has been developed for evaluation of ME antennas as a tool for neural implant design, and this prototype system was utilized to provide first experimental results with the transmission of magnetically modulated action potential waveforms. W

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A Test Setup for the Characterization of Lorentz-Force MEMS Magnetometers

Cited by 2 publications

References 36 publications

Monolithic Sensor Integration in CMOS Technologies

Monolithic Sensor Integration in CMOS Technologies

Circuit-Level Modeling and Simulation of Wireless Sensing and Energy Harvesting With Hybrid Magnetoelectric Antennas for Implantable Neural Devices

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