2011
DOI: 10.1002/pssa.201001086
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A Tersoff‐based interatomic potential for wurtzite AlN

Abstract: Aluminum nitride (AlN) is a popular buffer layer and interlayer. The understanding of how AlN serves as a wetting and fracturemitigating layer relies on molecular pictures of the AlN layer and the interfaces. However, molecular dynamics (MD) simulation studies on AlN system, particularly on its wurtzite phase, have been limited. This is because most existing interatomic force fields of AlN target the less common zinc blende phase. Here, we report a new Tersoff-based AlN force field for its wurtzite structure. … Show more

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Cited by 49 publications
(16 citation statements)
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“…All MD simulations are carried out by using the LAMMPS software package and adopting the Tersoff potential (all the potential parameters are given in Table S1) to model Al–N bonding interactions. After energy minimization with stress relaxation, the h -AlN model (see Figure a) is equilibrated for 1 ns under the NPT ensemble under in-plane ( x - and y -axis) pressures of 1 bar and at 300 K with a coupling time constant of 20 ps.…”
Section: Methodsmentioning
confidence: 99%
“…All MD simulations are carried out by using the LAMMPS software package and adopting the Tersoff potential (all the potential parameters are given in Table S1) to model Al–N bonding interactions. After energy minimization with stress relaxation, the h -AlN model (see Figure a) is equilibrated for 1 ns under the NPT ensemble under in-plane ( x - and y -axis) pressures of 1 bar and at 300 K with a coupling time constant of 20 ps.…”
Section: Methodsmentioning
confidence: 99%
“…Such thermalized fluxes are analogous to those of a molecular beam epitaxy or a high pressure sputtering process. The three-body Tersoff potential is applied to describe the atomic interactions between atoms, and its reliability and application have already been proved [ 25 , 27 , 29 ].
Figure 1.
…”
Section: Model and Methodsmentioning
confidence: 99%
“…In this paper, the growth of AlN on c-plane AlN is studied by the large-scale atomic/molecular massively parallel simulator [ 26 ] with the Tersoff potential [ 27 ]. At an N : Al flux ratio of 2.0, the growth temperature is varied from 1000 K to 2000 K with an increment of 200 K. Then the N : Al flux ratio is varied from 0.8 to 2.8 with an increment of 0.4 at 1800 K. The growth rate, crystallinity and stoichiometry under different conditions are discussed in detail.…”
Section: Introductionmentioning
confidence: 99%
“…The Large-scale Atomic/Molecular Massively Parallel Simulator (LAMMPS) [24] with SW potential [25,26] has been adopted. So far, there have been many potentials developed for GaN [27][28][29] and AlN [30,31], but few potentials describe the interatomic potentials of Al-Ga-N. In this work, the SW potential is chosen to describe the interatomic interaction in Al-Ga-N.…”
Section: Interatomic Potentialmentioning
confidence: 99%