Abstract:For the GaAs buffer layer deposited on Si substrate at 80°C and annealed at 300°C for 10 min, the size of most GaAs islands was observed as ∼ 10 nm but large islands (∼ 40 nm) were also seen. According to the calculation of spacing of moire fringes, large GaAs islands are considered to be rotated about 4 ° with respect to the Si substrate normal. However, for the main GaAs film overgrown on the GaAs buffer layer at 580 °C, moire fringes with the spacing of 5 nm (GaAs film without rotation) completely covered t… Show more
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