Abstract:In succession to our work on aluminium films a systematic database of thin‐film measurements on palladium films by electron probe microanalysis is presented. This time the measurements were performed at accelerating voltages between 4 and 30 kV, again on films of six different nominal thicknesses, ranging from 100 to 3200 Å, which were deposited simultaneously on 20 different substrates, ranging between Be and Bi. The purpose of this work was to provide further systematic data on which thin‐film programs can b… Show more
“…A simulated profile along z is shown in the lower part of Figure 5. Experimental profiles along z were extracted from the thin-films database of Bastin & Heijligers (2000 a , 2000 b ) considering the film thicknesses as equivalent to the subsequent milled surface.Figure 5Enhanced quantification applied on a simulated profile along z . The thin-film samples and beams position are defined at the top.…”
Section: Resultsmentioning
confidence: 99%
“…(A) Thin-film samples were accurately characterized by Bastin & Heijligers (2000 a , 2000 b ). They established a database containing X-ray intensities measured by wave length spectrometry (WDS) on thin films.…”
This paper presents a method developed to quantify three-dimensional energy dispersive spectrometry (3D EDS) data with voxel size smaller than the volume from which X-rays are emitted. The influence of the neighboring voxels is corrected by applying recursively a complex quantification, improving thereby the accuracy of the quantification of critically small features. The enhanced quantification method is applied to simulated and measured data. A systematic improvement is obtained compared with classical quantification, proving the concept and the prospect of this method.
“…A simulated profile along z is shown in the lower part of Figure 5. Experimental profiles along z were extracted from the thin-films database of Bastin & Heijligers (2000 a , 2000 b ) considering the film thicknesses as equivalent to the subsequent milled surface.Figure 5Enhanced quantification applied on a simulated profile along z . The thin-film samples and beams position are defined at the top.…”
Section: Resultsmentioning
confidence: 99%
“…(A) Thin-film samples were accurately characterized by Bastin & Heijligers (2000 a , 2000 b ). They established a database containing X-ray intensities measured by wave length spectrometry (WDS) on thin films.…”
This paper presents a method developed to quantify three-dimensional energy dispersive spectrometry (3D EDS) data with voxel size smaller than the volume from which X-rays are emitted. The influence of the neighboring voxels is corrected by applying recursively a complex quantification, improving thereby the accuracy of the quantification of critically small features. The enhanced quantification method is applied to simulated and measured data. A systematic improvement is obtained compared with classical quantification, proving the concept and the prospect of this method.
“…In detail, k ‐values are plotted against beam voltage and fitted with calculated k ‐values with elemental composition and thickness as free parameters. A layer density of 12.0 g/cm 3 was estimated …”
Section: Methodsmentioning
confidence: 99%
“…A layer density of 12.0 g/cm 3 was estimated. [7] Surface analysis by AES and XPS AES measurements were performed with a Physical Electronics PHI 700 TM Scanning Auger Nanoprobe. The spectra were taken at 5-kV beam voltage and 20-nA beam current.…”
“…Stanford [173] in 2020 measured the oxide layer formation on Pu from 35 nm to 400 nm using measured standards to build the k-ratio calibration curves of oxygen through FIM-SEM analysis. Previously, Bastin made a massive study collecting the K-ratios of Al [174] and Pd [175] of films from 10 to 320 nm in thickness at various beam energies between 3 kV and 30 kV on many substrates between Be and Bi.…”
The determination of thickness has a fundamental importance in all fields in which the implementation of films and coatings are required and takes a crucial role in the electroplating sector. The thickness influences many aspects of the coatings such as electrical, mechanical, corrosion protection, and even aesthetic properties. In the multitude of applications of thin layer coatings, the variability of thicknesses and materials is very high, as well as the variability of possible techniques that can be used to determine the characteristics of the layers of interest. The first distinction that can be made between these techniques is that which divides destructive techniques from non-destructive ones, in which, however, the semi- or micro-destructive techniques are immediately difficult to place. Other important parameters to consider are the cost, both for the purchase of the instrumentation and for each single analysis, the difficulties in preparing and measuring the sample, data processing, and obviously the detectable thickness ranges, the possible measurable materials, and precision and accuracy. The purpose of this work is to compare the characteristics of the various investigation methods, with a particular focus on metal film applications, so that it will be easier to choose the most suitable technique for each purpose.
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