A synchrotron-based kilowatt-level radiation source for EUV lithography

Jiang, Bingyan; Feng, Chao; Li, Changliang; Bai, Zhenghe; Wan, Weishi; Xiang, Dao; Gu, Qiang; Wang, Kun; Zhang, Qinglei; Huang, Dazhang; Chen, Senyu

doi:10.1038/s41598-022-07323-z

Cited by 12 publications

(6 citation statements)

References 19 publications

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“…Extreme ultraviolet lithography, which can significantly enhance the manufacturing process of high-end chips, is a new technique that promotes the reduction in critical dimensions in lithography to the 7 nm node and beyond. In comparison to other schemes [1][2][3][4][5][6], the LPP (laser-produced plasma) scheme [7] involves irradiating the target with a highenergy laser pulse to generate a high-temperature, high-density plasma, from which EUV light is subsequently emitted through de-excitation processes [8,9]. Being characterized by high conversion efficiency, controllable debris, small light-source size, stability and cleanliness [10], LPP represents the sole solution currently available for high-volume manufacturing (HVM) lithography machines.…”

Section: Introductionmentioning

confidence: 97%

Experimental Study on the Temporal Evolution Parameters of Laser–Produced Tin Plasma under Different Laser Pulse Energies for LPP–EUV Source

Chen,

Zhao,

Pan

et al. 2023

Photonics

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The laser–produced plasma extreme ultraviolet (LPP–EUV) source is the sole light source currently available for commercial EUVL (extreme ultraviolet lithography) machines. The plasma parameters, such as the electron temperature and electron density, affect the conversion efficiency (CE) of extreme ultraviolet radiation and other critical parameters of LPP–EUV source directly. In this paper, the optical emission spectroscopy (OES) was employed to investigate the time–resolved plasma parameters generated by an Nd:YAG laser irradiation on a planar tin target. Assuming that the laser–produced tin plasma satisfies the local thermodynamic equilibrium (LTE) condition, the electron temperature and electron density of the plasma were calculated by the Saha–Boltzmann plot and Stark broadening methods. The experimental results revealed that during the early stage of plasma formation (delay time < 50 ns), there was a significant presence of continuum emission. Subsequently, the intensity of the continuum emission gradually decreased, while line spectra emerged and became predominant at a delay time of 300 ns. In addition, the evolution trend of plasma parameters, with the incident laser pulse energy set at 300 mJ, was characterized by a rapid initial decrease followed by a gradual decline as the delay time increased. Furthermore, with an increase in the incident laser pulse energy from 300 mJ to 750 mJ, the electron temperature and electron density of laser–produced tin plasma exhibiting a monotonically showed increasing trend at the same delay time.

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Section: Introductionmentioning

confidence: 97%

Experimental Study on the Temporal Evolution Parameters of Laser–Produced Tin Plasma under Different Laser Pulse Energies for LPP–EUV Source

Chen,

Zhao,

Pan

et al. 2023

Photonics

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“…Note that after a modulation, the next modulation cannot be performed immediately due to the reduced beam quality. Therefore, the repetition rate of the proposed method (and other similar methods) is limited by the recovery time of the beam quality compared to the steady-state microbunching (SSMB) 29 , 30 or the reversible modulation method 20 . However, there is no suitable method to implement the SSMB and the reversible modulation method in a normal DLSR.…”

Section: Introductionmentioning

confidence: 99%

“…In this paper, we propose a novel method that combines angular dispersion-induced microbunching (ADM) [18][19][20][21] and a few-cycle laser to generate attosecond pulses in a DLSR. The ADM method takes advantage of the low emittance in the vertical direction of the storage ring, which can achieve microbunching in a single modulation and can be implemented in a straight section.…”

mentioning

confidence: 99%

Generating high repetition rate X-ray attosecond pulses in a diffraction limited storage ring

Liu,

Zhao,

Jiao

et al. 2023

Sci Rep

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To steer and track electron motion in atoms, molecules, and nanostructures, light pulses with attosecond duration and high repetition rate are required. In this paper, we use the angular dispersion-induced microbunching scheme and a few-cycle laser within a straight section (a few meters) of a diffraction-limited storage ring to generate a coherent high-flux attosecond pulse in the water window region. Simulation results based on the Southern Advanced Photon Source indicate that the proposed method can generate a chirp-free Fourier transform limited pulse with a minimum duration of 50 as, a maximum repetition rate of a few MHz, and a maximum average flux of about $$4.4\times 10^{11}$$ 4.4 × 10 11 photons/s/1%Bw.

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“…The angular dispersion-induced microbunching (ADM) scheme has been proposed to generate fully coherent ultra-short wavelength radiation pulses at a storage ring light source [1,20]- [22]. And a variant of the ADM scheme, called oblique incidence seed laser (OISL) also has been studied [23,24].…”

Section: Introductionmentioning

confidence: 99%

Lattice design for an improved angular dispersion-induced microbunching scheme

Jiang

Feng

et al. 2022

J. Inst.

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In this paper, an improved angular dispersion-induced microbunching (ADM) scheme [1] is studied to generate fully coherent soft x-ray radiation pulses in an electron storage ring light source with a limited energy modulation amplitude. This scheme releases the coupling between the dispersion function and the momentum compaction in the original ADM scheme. The lattice structure of the improved ADM is simple, which only adds a chicane following the dogleg compared to the original one. With the chicane, even higher harmonic radiation can be generated. Numerical simulation results show that soft x-ray radiation with photon energy covering the water window range can be produced.

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A synchrotron-based kilowatt-level radiation source for EUV lithography

Cited by 12 publications

References 19 publications

Experimental Study on the Temporal Evolution Parameters of Laser–Produced Tin Plasma under Different Laser Pulse Energies for LPP–EUV Source

Experimental Study on the Temporal Evolution Parameters of Laser–Produced Tin Plasma under Different Laser Pulse Energies for LPP–EUV Source

Generating high repetition rate X-ray attosecond pulses in a diffraction limited storage ring

Lattice design for an improved angular dispersion-induced microbunching scheme

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