2020
DOI: 10.1002/adma.202005625
|View full text |Cite
|
Sign up to set email alerts
|

A Suspended Silicon Single‐Hole Transistor as an Extremely Scaled Gigahertz Nanoelectromechanical Beam Resonator

Abstract: Recently, silicon (Si)-based single-electron/hole transistor (SET/SHT) showed great promise for next-generation electronics, such as quantum-dot-based quantum computation. [1-3] Leveraging advanced nanofabrication technology developed for very-large-scale integrated circuits, various architecture designs have been proposed to realize controllable single-electron/ hole tunneling. Suspended Si nanobeam SET/SHT, [4] which also acts as a nanoelectromechanical resonator, is one of these new architecture designs. Th… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1

Citation Types

0
2
0

Year Published

2021
2021
2023
2023

Publication Types

Select...
5

Relationship

2
3

Authors

Journals

citations
Cited by 5 publications
(2 citation statements)
references
References 44 publications
(80 reference statements)
0
2
0
Order By: Relevance
“…The experimental characterization of the device is performed at ∼20 mK. We use a frequency modulation (FM) mixing technique ,, to measure the mechanical resonance of the NEMPA. The key advantage of the FM technique is that it only detects contributions from mechanical vibrations of the device, thus providing an ideal way for electrically detecting mechanical response.…”
Section: Resultsmentioning
confidence: 99%
“…The experimental characterization of the device is performed at ∼20 mK. We use a frequency modulation (FM) mixing technique ,, to measure the mechanical resonance of the NEMPA. The key advantage of the FM technique is that it only detects contributions from mechanical vibrations of the device, thus providing an ideal way for electrically detecting mechanical response.…”
Section: Resultsmentioning
confidence: 99%
“…To detect the mechanical resonance of the nanomechanical resonator, a frequency modulation (FM) mixing technique 46,47…”
Section: Measurement Setupmentioning
confidence: 99%