A survey of the heteroepitaxial growth of semiconductor films on insulating substrates

The Properties of Silicon-on-Sapphire Substrates, Devices, and Integrated Circuits

“…Filby and Nielsen 15 reviewed the early SOS investigations carried out prior to 1967, while Cullen 16 extended his discussion through 1970. 18 Examining the chronology of SOS it becomes apparent that, during the late 1960s and early 1970s, the major emphasis was on understanding the interactions of the sapphire substrates with the silicon film. 18 Examining the chronology of SOS it becomes apparent that, during the late 1960s and early 1970s, the major emphasis was on understanding the interactions of the sapphire substrates with the silicon film.…”

Principal Ideas of Crystal Growth

“…Single crystals of different substances (e.g., alkali halides, group Ha fluorides, mica, quartz, sapphire, spinel, berillia) were investigated as cand idates for such substrates (68,69); however, sapphire (a-Al z 0 3) is virtually the only substance to have survived in this regard . Pioneering studies of Manasevit and co-workers'?"'?"…”

Metal Organic Vapor Phase Epitaxy Chemical Kinetics

“…The terms MOCVD/MOVPE were initially used by H. Manasevit [1,2] in a series of articles that are considered by most to have initiated the interest and tremendous growth in this process. Early embodiments of CVD initially focused on readily available reactants with sufficient purity.…”