A surface-micromachined resonant-beam pressure-sensing structure

Melvås, Patrik; Kälvesten, Edvard; Stemme, G.

doi:10.1109/84.967371

Cited by 29 publications

(20 citation statements)

References 12 publications

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“…During the design of the sensor, it should be ensured that the beam resonance frequency is lower than the resonance frequency of the diaphragm as in [8]. This constraint arises due to the fact that diaphragm need to be isolated from the beam vibration via the beam attachment to the diaphragm.…”

Section: Principle Of Operationmentioning

confidence: 99%

“…An earlier reported, all surface micromachined resonant pressure sensor as in [8] has one end of the resonating beam suspended beneath a pressure sensitive rectangular diaphragm and the other end to the edge of the vacuum sealed side wall cavity with electrostatic excitation and piezoresistive detection. The structure proposed as in [8] is modified to achieve higher sensitivity as in [9] and verified theoretically.…”

Section: Introductionmentioning

confidence: 99%

“…The structure proposed as in [8] is modified to achieve higher sensitivity as in [9] and verified theoretically. The main drawback of the proposed sensor design is that, in the sensing mechanism the electrical connections should be made on the diaphragm that could cause stiffening effect which may counteract the increased sensitivity.…”

Section: Introductionmentioning

confidence: 99%

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T-shaped resonating beam pressure sensor

Sujan

Vasuki

Uma

2012

2012 10th IEEE International Conference on Semiconductor Electronics (ICSE)

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A resonant pressure sensor with a provision for incorporating appropriate actuation and detection mechanism using fully surface micromachined process is presented in this paper. The pressure sensing element is a Tshaped resonating beam encapsulated beneath a polysilicon rectangular diaphragm and fully enclosed in a sealed vacuum cavity. This design enables high pressure sensitivity, miniature chip size and as well as good environmental isolation. The proposed structure is evaluated for pressure sensitivity theoretically and numerically using MEMS CAD tool CoventorWare. The pressure sensitivity of the sensor with a T-shaped 1.2 µm thick beam is found to be 10.2%/bar with the beam resonance frequency of about 792 kHz.

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Section: Principle Of Operationmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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T-shaped resonating beam pressure sensor

Sujan

Vasuki

Uma

2012

2012 10th IEEE International Conference on Semiconductor Electronics (ICSE)

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“…One of the main factors that limit the performance of microresonators is energy dissipation (Nguyen 2003;Melvas et al 2001;Wang et al 2003Wang et al , 2007Yazdi et al 1998). In the sensing as well as the filtering applications, the resolution and the power consumption are directly related to the energy loss of the resonator.…”

Section: Introductionmentioning

confidence: 98%

A Monte Carlo Simulation approach for the modeling of free-molecule squeeze-film damping of flexible microresonators

Leung

Cheung

et al. 2010

Microfluid Nanofluid

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Squeeze-film damping on microresonators is a significant damping source even when the surrounding gas is highly rarefied. This article presents a general modeling approach based on Monte Carlo (MC) simulations for the prediction of squeeze-film damping on resonators in the freemolecule regime. The generality of the approach is demonstrated in its capability of simulating resonators of any shape and with any accommodation coefficient. The approach is validated using both the analytical results of the free-space damping and the experimental data of the squeeze-film damping on a clamped-clamped plate resonator oscillating at its first flexure mode. The effect of oscillation modes on the quality factor of the resonator has also been studied and semi-analytical approximate models for the squeeze-film damping with diffuse collisions have been developed.

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“…Electrostatically-actuated micro-electro-mechanical systems (MEMS) devices are used for many pressure and mass sensing applications [1,2]. Such devices comprise a deformable electrode and a fixed electrode separated by a small air gap.…”

Section: Introductionmentioning

confidence: 99%

Numerical investigation into nonlinear dynamic behavior of electrically-actuated clamped–clamped micro-beam with squeeze-film damping effect

Liu¹,

Wang²

2014

Applied Mathematical Modelling

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a b s t r a c tA numerical investigation is performed into the nonlinear dynamic behavior of a clampedclamped micro-beam actuated by a combined DC/AC voltage and subject to a squeeze-film damping effect. An analytical model based on a nonlinear deflection equation and a linearized Reynolds equation is proposed to describe the deflection of the micro-beam under the effects of the electrostatic actuating force. The deflection of the micro-beam is investigated under various actuating conditions by solving the analytical model using a hybrid numerical scheme comprising the differential transformation method and the finite difference approximation method. It is shown that the numerical results for the dynamic pull-in voltage of the clamped-clamped micro-beam deviate by no more than 2.04% from those presented in the literature based on the conventional finite difference scheme. The effects of the AC voltage amplitude, excitation frequency, residual stress, and ambient pressure on the center-point displacement of the micro-beam are systematically explored. Moreover, the actuation conditions which ensure the stability of the micro-beam are identified by means of phase portraits. Overall, the results presented in this study confirm that the hybrid numerical method provides an accurate means of analyzing the complex nonlinear behavior of common electrostatically-actuated microstructures.

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A surface-micromachined resonant-beam pressure-sensing structure

Cited by 29 publications

References 12 publications

T-shaped resonating beam pressure sensor

T-shaped resonating beam pressure sensor

A Monte Carlo Simulation approach for the modeling of free-molecule squeeze-film damping of flexible microresonators

Numerical investigation into nonlinear dynamic behavior of electrically-actuated clamped–clamped micro-beam with squeeze-film damping effect

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