A Surface Micromachined Electrostatic Drop Ejector

Galambos, Paul C.; Zavadil, Kevin R.; Givler, Richard C.; Peter, Frank; Gooray, Art; Roller, George; Crowley, J.

doi:10.1007/978-3-642-59497-7_208

Cited by 12 publications

(15 citation statements)

References 6 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…For example, for comb-drive actuators, the peak voltage drop across the passivation layers (V d_p ) and that across the bulk liquid (V l_p ) for a sinusoidal actuation signal can be calculated can be calculated from (22) as…”

Section: B Limits On Actuation Potentialmentioning

confidence: 99%

See 1 more Smart Citation

A Model for Electrostatic Actuation in Conducting Liquids

Panchawagh

Sounart

Mahajan

2009

J. Microelectromech. Syst.

View full text Add to dashboard Cite

This paper presents a generalized model that describes the behavior of micromachined electrostatic actuators in conducting liquids and provides a guideline for designing electrostatic actuators to operate in aqueous electrolytes such as biological media. The model predicts static actuator displacement as a function of device parameters and applied frequency and potential for the typical case of negligible double-layer impedance and dynamic response. Model results are compared to the experimentally measured displacement of electrostatic comb-drive and parallelplate actuators and exhibit good qualitative agreement with experimental observations. The model is applied to show that the pull-in instability of a parallel-plate actuator is frequency dependent near the critical frequency for actuation and can be eliminated for any actuator design by tuning the applied frequency. In addition, the model is applied to establish a frequency-dependent theoretical upper bound on the voltage that can be applied across passivated electrodes without electrolysis.[2008-0307]

show abstract

Section: B Limits On Actuation Potentialmentioning

confidence: 99%

“…V l_RMS , required to calculate F e and x [cf. (18)], can now be calculated for sinusoidal and square-wave drive signals from (22) and (24), respectively, and, after simplification of the series solution for the square-wave case, is given by…”

Section: B Electrostatic Actuation In Conducting Liquidsmentioning

confidence: 99%

A Model for Electrostatic Actuation in Conducting Liquids

Panchawagh

Sounart

Mahajan

2009

J. Microelectromech. Syst.

View full text Add to dashboard Cite

show abstract

“…The design and implementation of HV integrated circuits using this protection technique are described in Sect. 3. The Simulation and experimental results are presented in Sect.…”

Section: Introductionmentioning

confidence: 99%

“…These applications are targeting a growing market including: HV aerospace Microsystems [1], small DC motor control [2], biomedical systems for Lab-on-Chip DNA samplers [3], ink jet printers [4] piezoelectric-based microrobot [5], etc. One application of special interest is fully integrated HV front-end interface for next generation medical ultrasound systems [6].…”

Section: Introductionmentioning

confidence: 99%

High-voltage DMOS integrated circuits using floating-gate protection technique

Chebli

El‐Sankary

Savaria

2009

Analog Integr Circ Sig Process

View full text Add to dashboard Cite

An efficient low power protection scheme for thin gate oxide of high voltage (HV) DMOS transistor is presented. To prevent gate-oxide breakdown and protect HV transistor, the voltage controlling its gate must be within 5 V from the HV supply. Thus signals from the low voltage domain must be level shifted to control the gate of this transistor. Usually this level shifting involves complex circuits that reduce the speed besides requiring of large power and area. In this paper, a simple and efficient protection technique for gate-oxide breakdown is achieved by connecting a capacitor divider structure to the floating-gate node of HV transistor to increase its effective gate oxide thickness. Several HV circuits, including: positive and negative HV doublers and level-up shifters suitable for ultrasound sensing systems are built successfully around the proposed technique. These circuits were implemented with 0.8 lm CMOS/DMOS HV DALSA process. Simulation and experimental results prove the good functionality of the designed HV circuits using the proposed protection technique for voltages up to 200 V.

show abstract

“…coming an important issue for a variety of applications such as aerospace Microsystems [1], biomedical systems like automatic DNA samplers [2], consumer electronic systems such as ink jet printers [3], and video display projectors like Digital Light Processor (DLP). It could also be used to control Liquid Crystal Displays (LCD) and new photonic devices such as Organic Light-Emitting Diode (OLED).…”

mentioning

confidence: 99%

System integration of high voltage electrostatic MEMS actuators

Saheb

Richard

Savaria

2007

Analog Integr Circ Sig Process

View full text Add to dashboard Cite

A system integration for High Voltage (HV) electrostatic MicroElectroMechanical Systems (MEMS) actuators is introduced on a micro-Printed Circuit Board. The system includes a programmable microcontroller, a programmable DC/DC converter, a multi output HV interface and electrostatic MEMS actuators. The system produces high output voltages (10-300 V) and can control a large variety of MEMS capacitive loads (1 to 50 pF) by combining diverse semiconductor technologies. This system proves that technologies, such as low voltage CMOS of different processes, high voltage DMOS and MEMS, can interact, communicate and even be integrated as a System In Package (SIP), providing significant size and cost reductions. The system was programmed to control electrostatic MEMS actuator. The DC/DC converter was made from components of different technologies and two addressable high voltage CMOS interfaces were fabricated with DALSA's 0.8 µm High Voltage process. A prototype of the global system has been built and tested.

show abstract

A Surface Micromachined Electrostatic Drop Ejector

Cited by 12 publications

References 6 publications

A Model for Electrostatic Actuation in Conducting Liquids

A Model for Electrostatic Actuation in Conducting Liquids

High-voltage DMOS integrated circuits using floating-gate protection technique

System integration of high voltage electrostatic MEMS actuators

Contact Info

Product

Resources

About