A surface micromachined capacitive absolute pressure sensor array on a glass substrate

Modeling of plates with multiple anisotropic layers and residual stress

“…This is particularly desirable in aerospace technology where minimizing weight is of great importance. In microtechnology, plates can be used for pressure sensors [1][2][3][4] and Capacitive Ultrasonic Micromachined Transducers (CMUTs) [5][6][7][8][9][10], where it may not be desirable to make the devices of only one layer. For both applications, each layer may posses different thicknesses, orientation and anisotropic elastic properties and may have a residual stress.…”

Evolution of micromachined pressure transducers for cardiovascular applications

“…Capacitive transducers were produced with diaphragms down to 70 m in length and 400 nm in thickness, though arrays were required to increase the sensing capacitance [75,76]. Piezoresistive transducers of similar scale were also reported, with the advantage that a single diaphragm sufficed [77,78].…”

“…However, the performance of early surface micromachined transducers did not match that of bulk micromachined transducers. Sensitivity, linearity (of piezoresistive transducers), and stability suffered [75,79,80]. Largely to blame were the poorer mechanical properties of poly-Si relative to monoSi, the higher noise factor in ultra small diaphragms, and the lower strain sensitivity of poly-Si piezoresistors (about 20% relative to mono-Si) [19,27,81].…”

Vacuum microelectronic pressure sensor with novel “stepped” or “curved” cathode

“…[1][2][3] The silicon piezoresistive pressure sensor, introduced in the 1960s and improved continuously since then, has been used extensively for precision pressure measurement. There are various types of pressure sensors based on different working principles, among which the silicon piezoresistive pressure sensors, the silicon capacitive pressure sensors, and the piezoelectric pressure sensors are most commonly used at present.…”