“…However, the performance of early surface micromachined transducers did not match that of bulk micromachined transducers. Sensitivity, linearity (of piezoresistive transducers), and stability suffered [75,79,80]. Largely to blame were the poorer mechanical properties of poly-Si relative to monoSi, the higher noise factor in ultra small diaphragms, and the lower strain sensitivity of poly-Si piezoresistors (about 20% relative to mono-Si) [19,27,81].…”