A Supersonic Plasma Jet Source for Controlled and Efficient Thin Film Deposition

Biganzoli, I; Fumagalli, Francesco; Fonzo, Fabio Di; Barni, R; Riccardi, C.

doi:10.4236/jmp.2012.330200

Cited by 18 publications

(13 citation statements)

References 35 publications

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“…These nanostructures often take form of nanorods, nanowires, and nanotubes, with chemical vapor deposition (CVD) and its more advanced variations, e.g., Plasma Assisted Supersonic Jet Deposition (PA-SJD), frequently used to produce such thin nanostructured films. [38][39][40] • The primary aim of our study is to gain a deeper insight into the interplay of several surface morphology descriptors such as ordering, connectivity, self-affinity and fractality of the plasma treated surfaces to discover how these characteristics influence the ultimate wettability and thus contribute to the development of another powerful tool for the future progress in the fabrication of PET-based and other functional nanomaterial-based devices.…”

Section: Introductionmentioning

confidence: 99%

Hydrophilicity and Hydrophobicity Control of Plasma‐Treated Surfaces via Fractal Parameters

Piferi

Bazaka

D'Aversa

et al. 2021

Adv Materials Inter

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It is still problematic to define a direct relationship between specific properties of a nanostructured surface (e.g., wettability) and its morphology. Not surprisingly, scientists continue to explore en masse the cut‐and‐try method. In this work, new insights are presented into the correlation of functional properties of the complex nanocomposites with their morphological characteristics. Using polyethylene‐terephthalate (PET) as a model material due to its importance and wide use in experiments, super‐hydrophilic nanocomposites amenable to be used in a variety of industrial applications are first developed, by exposing PET samples to oxygen plasma under controlled conditions. The morphology of the surfaces is confirmed using AFM and SEM techniques, and wettability in air and its oleophobic properties in water using contact angle and roll‐off measurements. Next, different analytical tools such as Minkowski connectivity (Euler‐Poincaré characteristic), Hough distributions and 2D FFT are applied to study ordering, connectivity, and fractal characteristics of the samples. It is concluded that fractal dimension, along with ordering and connectivity, are among the major characteristics of the nanocomposite that determine many important physical and chemical properties of the functional nanomaterials, and the fractal dimension could be a target morphological feature to inform the design of fabrication technology.

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Section: Introductionmentioning

confidence: 99%

Hydrophilicity and Hydrophobicity Control of Plasma‐Treated Surfaces via Fractal Parameters

Piferi

Bazaka

D'Aversa

et al. 2021

Adv Materials Inter

Self Cite

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“…The PA-SJD [ 42 , 43 ] technique consists of a two-step process confined within two stainless steel vacuum chambers of cylindrical shape that are connected via a small nozzle of varying aperture size. The plasma chamber used in this study had a length L p = 95 mm and radius R p = 62.5 mm, and the respective metrics of the deposition chamber were L D = 200 mm and R D = 160 mm (see Figure 1 ).…”

Section: Methodsmentioning

confidence: 99%

“…We employed the quadrupole mass spectrometer (QMS) Hiden EQP-1000 Analyzer (Warrington, UK) in order to detect neutrals, radicals, and ion species [ 42 ]. The QMS could be positioned along the jet center line (the z -axis), so we are able to sample chemical species at different positions, as well as provide in situ real-time sampling.…”

Section: Methodsmentioning

confidence: 99%

Controlled Deposition of Nanostructured Hierarchical TiO2 Thin Films by Low Pressure Supersonic Plasma Jets

et al. 2022

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Plasma-assisted supersonic jet deposition (PA-SJD) is a precise technique for the fabrication of thin films with a desired nanostructured morphology. In this work, we used quadrupole mass spectrometry of the neutral species in the jet and the extensive characterization of TiO2 films to improve our understanding of the relationship between jet chemistry and film properties. To do this, an organo-metallic precursor (titanium tetra–isopropoxide or TTIP) was first dissociated using a reactive argon-oxygen plasma in a vacuum chamber and then delivered into a second, lower pressure chamber through a nozzle. The pressure difference between the two chambers generated a supersonic jet carrying nanoparticles of TiO2 in the second chamber, and these were deposited onto the surface of a substrate located few centimeters away from the nozzle. The nucleation/aggregation of the jet nanoparticles could be accurately tuned by a suitable choice of control parameters in order to produce the required structures. We demonstrate that high-quality films of up to several µm in thickness and covering a surface area of few cm2 can be effectively produced using this PA-SJD technique.

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“…The growth ofthin and ultra-thin films may be achieved using a large variety oftechniques such as chemical vapour deposition, RF sputtering, pulsedlaser deposition or plasma enhanced chemical vapour deposition [1][2][3]. Recently, a new process, which uses aplasma torch operating at low pressure has been developed with theaim of depositing uniform thin layers on large surfaces [4,5]. In this plasma spraying process plasma jets areused as a heat sources to melt and accelerate the injected nanoparticles which subsequently impinge and solidify on a substrate.…”

Section: Introductionmentioning

confidence: 99%

The Interaction of a Supersonic Plasma Jet Containing Nanoparticles With a Substrate

Kravchenko¹,

Maruschak²

2021

Problems of Atomic Science and Technology

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In the framework of a multi-fluid axisymmetric hydrodynamic model, the interaction of a supersonic plasma jet containing nanoparticles with a flat substrate is investigated using computer simulation. In particular, the fluxes of nanoparticles on the substrate are studied at plasma inlet pressure P0=1...100 Torr. The results show that a shock wave is formed near the substrate, which affects the energy of nanoparticles and their fluxes on the substrate. The width of the region along the radius, where the flow of nanoparticles onto the substrate is essential, depends on the plasma pressure in the jet. At large values of plasma pressure (P0≥75 Torr) a cloud of nanoparticles with a sharp boundary is formedon the axis of the plasma jet near the substrate. Interacting with this cloud, nanoparticles moving in the plasma jet, lose directed energy and their flow on the substrate near the axis of the jet is zero.

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A Supersonic Plasma Jet Source for Controlled and Efficient Thin Film Deposition

Cited by 18 publications

References 35 publications

Hydrophilicity and Hydrophobicity Control of Plasma‐Treated Surfaces via Fractal Parameters

Hydrophilicity and Hydrophobicity Control of Plasma‐Treated Surfaces via Fractal Parameters

Controlled Deposition of Nanostructured Hierarchical TiO2 Thin Films by Low Pressure Supersonic Plasma Jets

The Interaction of a Supersonic Plasma Jet Containing Nanoparticles With a Substrate

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