A supercritical removal method: the rapid elimination of impurities in polymethyl-methacrylate at near room temperature and a mechanism investigation of insulating property improvements

Qi, Kang; Li, Lei; Chang, Kuan‐Chang; Lin, Xinnan; Liu, Heng Jui; Lai, Ying‐Chih; Zheng, Haiting; Huang, Guangyan; Kuo, Tzu-Peng

doi:10.1039/d0tc03975f

Cited by 12 publications

(9 citation statements)

References 23 publications

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“…The Poole−Frenkel mechanism reflects the existence of defects, while Schottky emission represents reduction of defects. 33,34 The above results indicate that the insulation characteristics of gate dielectric have been greatly improved, which is also supported by the reduction of the leakage current, as shown in Figure 2d. Material analysis including Fourier transform infrared (FTIR) spectroscopy and X-ray photoelectron spectroscopy (XPS) is conducted on SiO 2 and the a-IGZO film to uncover the changes inside devices before and after SCA treatment, as shown in Figures 4 and 5.…”

Section: Resultssupporting

confidence: 60%

“…The band models of Poole–Frenkel conduction and Schottky conduction are shown in Figure b,c. The Poole–Frenkel mechanism reflects the existence of defects, while Schottky emission represents reduction of defects. , The above results indicate that the insulation characteristics of gate dielectric have been greatly improved, which is also supported by the reduction of the leakage current, as shown in Figure d.…”

Section: Resultsmentioning

confidence: 61%

“…Therefore, an effective and simple postprocess technique to regulate interfacial attribute, so as to realize DM a-IGZO TFTs at low temperature, is needed. Supercritical methodology is one of the low-temperature techniques that have been applied in a variety of electronic devices to modulate their electrical parameters. − The supercritical fluid state is a special substance phase, which is featured in the coexistence of the liquid phase and gas phase with liquid-like high solubility ability and gas-like penetration. − Consequently, supercritical fluid has the intrinsic advantage in introducing designated particles or molecules into target devices. Furthermore, flexible electronics call for low-temperature techniques, and the critical temperature of supercritical carbon dioxide fluids (SCCO 2 ) is only about 32 °C, low enough to be compatible with most fabrication processes and flexible requirement without deteriorating material property. − …”

Section: Introductionmentioning

confidence: 99%

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Supercritical Ammoniation-Enabled Interfacial Polarization for Function-Mode Transformation and Overall Optimization of Thin-Film Transistors

Chang

et al. 2021

ACS Appl. Mater. Interfaces

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Thin-film transistors (TFTs) have drawn widespread applications in the increasingly sophisticated display field. Despite the mature process of fabricating enhancement-mode TFTs, lack of facile methods to realize depletion-mode TFTs restrains the implementation of complementary-type circuits, which in turn leads to relatively high power. Here, the supercritical fluid technique is introduced to elaborately design and tune the interface, providing the opportunity for function-mode transformation of TFTs. By harnessing supercritical-assisted ammoniation (SCA) treatment, interfacial polarization induces negative shift of threshold voltage (from 0.2 to −9.8 V), which allows TFTs to remain normally on-state in the absence of complex capacitor-integrated circuits. This convenient technique, without an additional manufacturing process to achieve function-mode transformation, can thus enable the fabrication of comprehensive-mode TFTs under the same process. Furthermore, comprehensive optimizations in the mobility (increases from 2.08 to 17.12 cm 2 V −1 s −1 ), leakage current (reduces from 1.33 × 10 −11 to 2.22 × 10 −12 A), hysteresis (reduces from 11.2 to 0.2 V), and on/off current ratio (increases from 9.65 × 10 4 to 7.98 × 10 6 ) are achieved simultaneously. Based on conjoint analysis of electrical and material characterization, a reaction model is established for a clearer understanding of the interfacial polarization process. Overall, this lowtemperature SCA treatment offers an environmentally benign strategy to modulate the function mode of electronic devices via interfacial engineering and optimize device performance at the same time, exhibiting promise in promoting the implementation of complementary, low-power circuit.

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Section: Resultssupporting

confidence: 60%

Section: Resultsmentioning

confidence: 61%

Section: Introductionmentioning

confidence: 99%

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Supercritical Ammoniation-Enabled Interfacial Polarization for Function-Mode Transformation and Overall Optimization of Thin-Film Transistors

Chang

et al. 2021

ACS Appl. Mater. Interfaces

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“…Sustainable supercritical CO 2 (SCCO 2 ) fluid technology − is capable of manipulating the material properties and structure in a simple and effective approach via utilizing and recycling CO 2 . The supercritical state, as the fourth phase state besides solid, liquid, and gas, refers to a special state in thermodynamics.…”

Section: Introductionmentioning

confidence: 99%

“…When the temperature and pressure surpass the critical point, substances will enter their supercritical fluid. Previous work proved that the SCCO 2 -related technology can enhance the dielectric properties of sputter-deposited films in a fast way , and passivate the defects at low temperature. ,,− However, the SCCO 2 method has not been exploited in preparing ZnO nanotubes. Taking advantage of its excellent material modulation characteristics, supercritical fluid technology is exploited in this research to prepare ZnO nanotubes, through which ultrathin ZnO nanotubes with an extremely thin wall are successfully fabricated.…”

Section: Introductionmentioning

confidence: 99%

Eco-Friendly, Highly Efficient Ethanol-Assisted Supercritical Preparation of an Ultrathin ZnO Nanotube

Chang

Zhou

et al. 2021

ACS Sustainable Chem. Eng.

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The nanotubes widely used in the advanced semiconductor manufacturing field suffer from complicated timeand energy-consuming synthesis processes, thus requiring an efficient preparation method. In this study, ethanol-assisted supercritical treatment (SC-EA), a sustainable approach with less environmental hazard, has been applied to efficiently synthesize ZnO nanotubes. Materials free from any detrimental effect on the environment have been utilized in the proposed ethanol−water mixed supercritical fluid technique to realize nanotube growth. High synthetic efficiency, eco-friendly processing, and an ultrasimple procedure are achieved in the SC-EA treatment at a low temperature and with a low preparation cost. The analysis results from scanning electron microscopy (SEM) and transmission electron microscopy (TEM) collectively confirm the successful synthesis of ZnO nanotubes with an ultrathin crystalline wall of only 3 nm. A chemical reaction model is established for a better understanding of the SC-EA process in which ethanol molecules act as the surfactants to help ZnO nanotubes grow by forming nanocells. Such a green supercritical methodology, by means of an eco-friendly synthesis system in achieving CO 2 reutilization and recycling, provides a bright future to modulate a variety of nanostructured materials in a facile and efficient way.

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Performance Enhancement of Tricalcium Phosphate Film for Bioelectronics with Bio‐Friendly Supercritical Fluids Desorption Technology

Peng,

Wang,

et al. 2024

Adv Elect Materials

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In the rapidly advancing field of bioelectronics, searching for materials that combine superior insulating properties with biocompatibility is crucial, especially for implantable electronic devices. Traditional insulators in mature CMOS processes, though effective, lack biocompatibility, necessitating the exploration of alternative materials. This study introduces tricalcium phosphate (Ca3(PO4)2), a primary component of human bones, and teeth, as an insulating layer material for the first time. High‐quality, thickness‐controlled Ca3(PO4)2 films are fabricated using magnetron sputtering, and their electrical insulation, stability, and optical transparency have been thoroughly evaluated. To further optimize the insulation performance of Ca3(PO4)2, particularly against residual impurities, and fabrication‐induced defects, a bio‐friendly low‐temperature supercritical fluid desorption (LTSCF‐Desorption) technique is developed, effectively removing impurities, repairing defects, and improving the interface states. After LTSCF‐Desorption treatment, the leakage current of the Ca3(PO4)2 films is reduced by 30%, along with the enhancements of the films' stability and transmittance. Further material analysis clarified the internal mechanisms behind the improvement of the Ca3(PO4)2 films. Overall, this study not only broadens the application scenarios of Ca3(PO4)2 in bioelectronics but also develops a bio‐friendly supercritical desorption technique, providing a new pathway for optimizing the performance of bioelectronic devices and materials.

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A supercritical removal method: the rapid elimination of impurities in polymethyl-methacrylate at near room temperature and a mechanism investigation of insulating property improvements

Abstract: Polymethyl methacrylate (PMMA) has been widely applied in semiconductor fields due to its excellent transparent and durable specialty, but impurities in polymerization process result in electric leakage and are tough...

Cited by 12 publications

References 23 publications

Supercritical Ammoniation-Enabled Interfacial Polarization for Function-Mode Transformation and Overall Optimization of Thin-Film Transistors

Supercritical Ammoniation-Enabled Interfacial Polarization for Function-Mode Transformation and Overall Optimization of Thin-Film Transistors

Eco-Friendly, Highly Efficient Ethanol-Assisted Supercritical Preparation of an Ultrathin ZnO Nanotube

Performance Enhancement of Tricalcium Phosphate Film for Bioelectronics with Bio‐Friendly Supercritical Fluids Desorption Technology

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