Abstract:Influences of substrate temperature on crystal structure, surface topography and surface morphology of cerium dioxide or ceria (CeO2) thin films deposited using radio frequency (RF) magnetron sputtering were studied. The substrate temperature was varied i.e. room temperature, 100, 200 and 300 °C. The characteristics of the film surface could be controlled by tuning the substrate temperature. As studied in the X-ray diffraction (XRD) analysis, the CeO2 thin films exhibited a cubic fluorite structure with predom… Show more
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