A Study on the Real-Time Flow Rate Change Monitoring Methods of Mass Flow Controller in In-Situ Semiconductor Processing

Kim, Tae Min; Jeon, Jae Wook

doi:10.1109/asmc51741.2021.9435716

Cited by 2 publications

(1 citation statement)

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“…Accurate detection and evaluation of oil well production is of great significance to the development and progress of modern petroleum industry [2][3][4]. The traditional total flow detection methods in the oil industry mainly include throttling method [5], mass method [6], speed method [7], etc. These methods are suitable for high-yield Wells and more practical when the flow is large.…”

Section: Introductionmentioning

confidence: 99%

Research on small flow detection method based on constant power method

Qin

Dang

2022

Eng. Res. Express

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In the field of three phase flow testing, real-time and online wellhead production detection has become an indispensable trend for evaluating well production and well condition. At present, the production of most conventional oil fields in China is low, and there are many Wells with less than 10 m3/d . It is difficult to detect the flow of low-flow Wells with conventional metering methods. Therefore, this paper proposes to use thermal flowmeter temperature difference method to measure the flow value. First, COMSOL Multiphysics 5.6 software was used to build the model of the thermal flow meter and set the size of the temperature probe, heating probe and velocity probe. Secondly, relevant parameters are set to simulate two steady state forms with different water content and different flow rate. Finally, the temperature changes of the velocity probe are simulated under the two conditions. The simulation results show that when the water content is the same and the flow velocity is between 0.0059m/s and 0.059m/s, the temperature of the probe decreases with the flow velocity increasing, and the temperature of the probe increases with the flow velocity decreasing. At the same flow rate and water content between 0% and 100%, the higher the water content, the lower the temperature of the speed-measuring probe, and the smaller the water content, the higher the temperature of the speed-measuring probe. The simulation results show that thermal flowmeter can be competent for flow detection of low production fluid and low flow well, which provides the basis for the detection method of low production fluid in the future and lays the foundation for the design of thermal flowmeter.

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