A Study on the Quantitative Risk Analysis Using CFD for the Fuel Gas Supply System of Gas Fueled Ship

Optimal Ventilation Design for Flammable Gas Leaking from Gas Box Used in Semiconductor Manufacturing: Case Study on Korean Semiconductor Industry

“…For the analyzed sample, the equivalent emission concentration is calculated according to the following equation. The concentration is calculated using Equation (7), and the experimental equipment is shown in Figure 2. The basic exhaust conditions for the experiment are as follows.…”

“…In the case of S1, the measurement sample, the measured SF6 concentration was 119.41 ppm. The ERC value can be obtained using Equation (7). The ERC of the process chemicals can be calculated using the tracer gas concentration measured with a multi-gas detector.…”

“…In the case of S1, the measurement sample, the measured SF6 concentration was 119.41 ppm. The ERC value can be obtained using Equation (7). By measuring the concentration with an opening area of 57% of the duct cross-sectional area, it was found that, in some cases, the concentration exceeded 10,000 ppm, which is 25% of the LEL.…”

“…However, the Semiconductor Equipment and Materials International (SEMI) is distributing safety guidelines for reference, but the Fire 2023, 6, 432 2 of 14 information presented in these materials does not provide specific design standards, and the guidelines are not enforced. Consequently, semiconductor manufacturers follow different standards [7].…”