A Study on the G-Sensitivity Error of MEMS Vibratory Gyroscopes

Abstract

-In this paper, we describe the analysis and the compensation method of the g-sensitivity error for MEMS vibratory gyroscopes. Usually, the g-sensitivity error has been ignored in the commercial MEMS gyroscope, but it deserves our attention to apply for the missile application as a tactical grade performance. Thus, it is necessary to compensate for the g-sensitivity error to reach a tactical grade performance. Generally, the g-sensitivity error seems intuitively to be a gyroscope bias error proportional to the linear acceleration. However, we assert that the g-sensitivity error mainly causes not a bias error but a scale-factor error. And we verify that the g-sensitivity scale-factor error occurs due to the non-linearity of parallel plate electrodes. Therefore, we propose the compensation method to remove the g-sensitivity scale-factor error. The experimental result showed that a proposed compensation method improved successfully the performance of the MEMS vibratory gyroscope.

A Study on the Design of Isolator and the Mounting Method for Reducing the Pyro-Shock of a MEMS IMU

“…On the other hand, the demand for the MEMS IMU is increasing due to the miniaturization and cost reduction of weapon systems. Therefore, various studies are being undertaken to analyze the effects of disturbances on the IMU and to improve them [3][4][5][6][7][8][9]. In order to carry out the mission, the weapon system experiences injection or separation.…”