“…In ELID grinding process, the polishing effect of oxide film makes the ultra-precision grinding surface a reality. In order to further improve the grinding quality of ELID grinding technology, many researchers conducted extensive researches on the electrolytic deposition process [1], composition, physical and mechanical properties [2], tribological properties [3], thickness [4], stiffness [5], and online control of oxide film, and had obtained results with practical value. The results of previous studies show that the formation, updating and shedding of an oxide film are dynamic, and therefore the composition, performance, thickness, stiffness, adhesion properties, etc.…”