2021
DOI: 10.3390/catal11111416
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A Study on the Characteristic and Antibacterial Activity of Ti3Ox Thin Films

Abstract: A pure Ti target in Ar/O2 gas mixture was used to synthesize Ti3Ox thin film on a glass substrate by Reactive High-Power Impulse Magnetron Sputtering (HiPIMS) under different sputtering power (2 and 2.5 kW). The influence of HiPIMS parameters on thin films’ structural, morphological, chemical composition, optical and photocatalytic, and antibacterial properties was investigated. In this study, Ti3Ox thin films can be synthesized using the HiPIMS method without the post-annealing process. Two co-existence phase… Show more

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Cited by 4 publications
(7 citation statements)
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References 66 publications
(82 reference statements)
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“…A standard glass substrate (FEA, Microscope slides ground Edges Plain, FEA Industries Inc., Morton, PA, US) was 76 × 25 mm. The substrates were cleaned before using the sonicating and rinsing procedure described in reference [ 4 , 9 ]. The distance between target and substrate was set at 150 mm.…”
Section: Methodsmentioning
confidence: 99%
See 2 more Smart Citations
“…A standard glass substrate (FEA, Microscope slides ground Edges Plain, FEA Industries Inc., Morton, PA, US) was 76 × 25 mm. The substrates were cleaned before using the sonicating and rinsing procedure described in reference [ 4 , 9 ]. The distance between target and substrate was set at 150 mm.…”
Section: Methodsmentioning
confidence: 99%
“…The ZnO thin-film antimicrobial properties were evaluated by the interaction of the microbial cells with the surface of the ZnO thin films under UV-A irradiation, as followed by the previous report [ 9 , 47 , 50 ] ( Figure 1 ). Thin-film samples of 1 cm × 1 cm, previously sterilized with 70% ethanol for 2 h and rinsed in sterile deionized water, then were placed in 12-weel sterilized cell culture plates (SPL Life Sciences Co., Ltd., Pocheon-si, Gyeonggi-do, Korea).…”
Section: Methodsmentioning
confidence: 99%
See 1 more Smart Citation
“…The vast potential of l-Ti 3 O 5 has attracted many researchers: various synthesis methods have been developed, [36][37][38][39][40][41][42][43][44][45][46][47][48][49] studies of phase transition mechanism have been reported, [50][51][52][53][54][55][56][57][58][59][60][61][62][63][64][65][66] and novel functionalities are being explored. [67][68][69][70][71][72][73][74][75][76] Since l-Ti 3 O 5 is composed of readily available elements of titanium and oxygen, it offers harmless, sustainable, and economic features, which are advantageous in industrial applications.…”
Section: Summary and Perspectivesmentioning
confidence: 99%
“…Among them, titanium oxides have sparked considerable interest for their diverse crystalline structures and intricate optical and electrochemical properties. 14 Despite TiO 2 only responding to the UV light range, it is one of the most classical photoactive materials owing to its nontoxicity, low cost, excellent chemical stability, and favorable energy band edge. According to previous studies, rutile TiO 2 (3.0 eV) with stable chemical properties has a narrower band gap than that of anatase (3.2 eV), allowing it to operate in the visiblelight region.…”
Section: Introductionmentioning
confidence: 99%