Abstract:A numerical simulation method is developed to analyze dynamic response of electrostatic actuator, which is electromechanical coupled system. The developed method is applied to find a dynamic response of a cantilever-type switch model, which is a basic component of electro-mechanical coupled system driven by electrostatic force. First, point charges model on conductor is proposed as a lumped parameter model of electrical part. Then, this model is easily incorporated into a multi-body dynamics analysis algorithm… Show more
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