A study on co-axial water-jet assisted fiber laser grooving of silicon

Madhukar, Yuvraj K.; Mullick, Suvradip; Nath, Ashish Kumar

doi:10.1016/j.jmatprotec.2015.08.013

Cited by 28 publications

(4 citation statements)

References 38 publications

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“…Moreover, waterjet-guided laser machining equipment is generally expensive and has high maintenance costs, which limits the application of this technology in the manufacturing industry [ 25 ]. To avoid these problems, Madhukar and Mullick et al [ 26 , 27 , 28 , 29 , 30 , 31 ] proposed a coaxial waterjet-assisted laser machining method. This method is different from waterjet-guided laser machining.…”

Section: Introductionmentioning

confidence: 99%

Experimental Study on Coaxial Waterjet-Assisted Laser Scanning Machining of Nickel-Based Special Alloy

Wang

Yuan

et al. 2023

Micromachines

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The problems of the recast layer, oxide layer, and heat-affected zone (HAZ) in conventional laser machining seriously impact material properties. Coaxial waterjet-assisted laser scanning machining (CWALSM) can reduce the conduction and accumulation of heat in laser machining by the high specific heat capacity of water and can realize the machining of nickel-based special alloy with almost no thermal damage. With the developed experimental setup, the laser ablation threshold and drilling experiments of the K4002 nickel-based special alloy were carried out. The effects of various factors on the thermal damage thickness were studied with an orthogonal experiment. Experimental results have indicated that the ablation threshold of K4002 nickel-based special alloy by a single pulse is 4.15 J/cm2. The orthogonal experiment results have shown that the effects of each factor on the thermal damage thickness are in the order of laser pulse frequency, waterjet speed, pulse overlap rate, laser pulse energy, and focal plane position. When the laser pulse energy is 0.21 mJ, the laser pulse frequency is 1 kHz, the pulse overlap is 55%, the focal plane position is 1 mm, and the waterjet speed is 6.98 m/s, no thermal damage machining can be achieved. In addition, a comparative experiment with laser drilling in the air was carried out under the same conditions. The results have shown that compared with laser machining in the air, the thermal damage thickness of CWALSM is smaller than 1 μm, and the hole taper is reduced by 106%. There is no accumulation and burr around the hole entrance, and the thermal damage thickness range is 0–0.996 μm. Furthermore, the thermal damage thickness range of laser machining in the air is 0.499–2.394 μm. It has also been found that the thermal damage thickness is greatest at the entrance to the hole, decreasing as the distance from the entrance increases.

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Section: Introductionmentioning

confidence: 99%

Experimental Study on Coaxial Waterjet-Assisted Laser Scanning Machining of Nickel-Based Special Alloy

Wang

Yuan

et al. 2023

Micromachines

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“…Nevertheless, the development of WJGL is still restrained. Madhukar [11] found that the amount of laser energy required to remove a unit volume of material was more in WJGL cutting. This is because the water jet inevitably absorbs the laser energy during the laser transmission, resulting in low energy utilization.…”

Section: Introductionmentioning

confidence: 99%

Annular gas-assisted water jet guided laser manufacturing groove structure of Inconel 718 alloy

Zhao¹,

Zhao

Zhao³

et al. 2023

Preprint

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Inconel 718 offers high oxidation resistance, mechanical strength, and heat resistance, which enables turbofan engines to maintain excellent performance in an operating environment of 1000°C. These properties make Inconel 718 difficult to machine by conventional machining techniques. Water jet guided laser (WJGL) is a composite processing technology that combines water cooling and laser processing technology. Therefore, it is advantageous and promising in processing Inconel 718. However, the water layer on the substrate surface in processing limits WJGL 's ability to ablate the metal, which leads to burrs formed when manufacturing groove structures. Therefore, a new method for manufacturing groove structure on Inconel 718 by Annular gas-assisted water jet guided laser (AGAWJGL) is proposed in this paper. This method reduces burrs and improves material removal efficiency by removing the water layer from the substrate surface with the gas-assisted. Then, groove processing experiment are performed on Inconel 718 alloy sheets with thickness of 1 mm. The experimental results show that the average size of burrs reduces 36%, and the depth of grooves increases 13%. These provide the theoretical foundation for the WJGL machining of Inconel 718.

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“…On this occasion, the allowable repetition rate is generally restricted [9]. Flowing liquid or waterjets are widely applied to solve the intractable problems in liquidassisted laser ablation, including waterjet assisted underwater laser cutting [10,11], coaxial waterjet-assisted laser processing [12][13][14], waterjet-guided laser processing [15][16][17], overflow-assisted laser machining [18,19], and hybrid laserwaterjet ablation technology [20][21][22]. A liquid jet without turbulence and free of bubbles is generally preferred, but hard to obtain.…”

Section: Introductionmentioning

confidence: 99%

Laser-induced microjet-assisted ablation for high-quality microfabrication

Guo¹,

Qiu²,

Xu³

et al. 2022

Int. J. Extrem. Manuf.

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Liquid-assisted laser ablation has the advantage of relieving thermal effects of common laser ablation processes, whereas the light scattering and shielding effects by laser-induced cavitation bubbles, suspended debris, and turbulent liquid flow generally deteriorate laser beam transmission stability, leading to low energy efficiency and poor surface quality. Here, we report that a continuous and directional high-speed microjet will form in the laser ablation zone if laser-induced primary cavitation bubbles asymmetrically collapse sequentially near the air-liquid interface under a critical thin liquid layer. The laser-induced microjet can instantaneously and directionally remove secondary bubbles and ablation debris around the laser ablation region, and thus a very stable material removal process can be obtained. The shadowgraphs of high-speed camera reveal that the average speed of laser-induced continuous microjet can be as high as 1.1 m/s in its initial 500 μm displacement. The coupling effect of laser ablation, mechanical impact along with the collapse of cavitation bubbles and flushing of high-speed microjet helps achieve a high material removal rate and significantly improved surface quality. We name this uncovered liquid-assisted laser ablation process as laser-induced microjet-assisted ablation (LIMJAA) based on its unique characteristics. High-quality microgrooves with a large depth-to-width ratio of 5.2 are obtained by LIMJAA with a single-pass laser scanning process in our experiments. LIMJAA is capable of machining various types of difficult-to-process materials with high-quality arrays of micro-channels, square and circle microscale through-holes. The results and disclosed mechanisms in our work provide a deep understanding of the role of laser-induced microjet in improving the processing quality of liquid-assisted laser micromachining.

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A study on co-axial water-jet assisted fiber laser grooving of silicon

Cited by 28 publications

References 38 publications

Experimental Study on Coaxial Waterjet-Assisted Laser Scanning Machining of Nickel-Based Special Alloy

Experimental Study on Coaxial Waterjet-Assisted Laser Scanning Machining of Nickel-Based Special Alloy

Annular gas-assisted water jet guided laser manufacturing groove structure of Inconel 718 alloy

Laser-induced microjet-assisted ablation for high-quality microfabrication

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