A study of volatile organic compounds diffusion in thin plasma polymerized TEOS thin film

Bougharouat, A.; Bellel, A.; Sahli, S.

doi:10.1109/icm.2012.6471391

2012 24th International Conference on Microelectronics (ICM) 2012

DOI: 10.1109/icm.2012.6471391

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A study of volatile organic compounds diffusion in thin plasma polymerized TEOS thin film

A. Bougharouat

A. Bellel

S. Sahli

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A study of volatile organic compounds diffusion in thin plasma polymerized TEOS thin film

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References 22 publications

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