Abstract:In this article, a new interferometer which accuracy does not depend on the accuracy of
the reference is proposed. This interferometer calculates the surface profile of the measured mirror
surface using two steps. At the first step, the interferometer obtains the data concerning the
reference and a polarized beam splitter (PBS). The interferometer works as a Mach-Zehnder
interferometer. At the second step, since the polarized beam splitter is rotated 90 degree, the
measured mirror is lightened by a laser beam.… Show more
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