A study of sputtering process for nanocrystalline FeAlN soft magnetic thin films

Ma, Yu; Li, Xiaohong; Xie, Ting; Wei, Fulin; Yang, Zheng

doi:10.1016/s0921-5107(03)00239-3

Cited by 23 publications

(7 citation statements)

References 12 publications

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“…Magnetron sputtering was utilized to fabricate nanocrystalline soft magnetic FeAlN films with grain sizes 9−15 nm on glass or Si (111) substrates either ex situ or in situ and further crystallized by vacuum annealing at 300−350 °C. 151 The ex situ process consisted of the growth of FeAlN films on water-cooled substrates and postannealing at 200−450 °C under N 2 to give α-Fe phase structure with lattice dilation of 0.19−0.37%. In the in situ process, the FeAlN films were grown on substrates maintained at 60−220 °C under N 2 to provide a composite phase structure of α-Fe + γ′-Fe 4 N.…”

Section: Synthesis Of Iron Nitridesmentioning

confidence: 99%

“…Ternary Fe-based nitride nanostructures exist either as nanocrystalline films or as NP powder, the precursors of the latter synthesized by sol–gel routes. Magnetron sputtering was utilized to fabricate nanocrystalline soft magnetic FeAlN films with grain sizes 9–15 nm on glass or Si(111) substrates either ex situ or in situ and further crystallized by vacuum annealing at 300–350 °C . The ex situ process consisted of the growth of FeAlN films on water-cooled substrates and postannealing at 200–450 °C under N 2 to give α-Fe phase structure with lattice dilation of 0.19–0.37%.…”

Section: Synthesis Of Iron Nitridesmentioning

confidence: 99%

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Iron Nitride Family at Reduced Dimensions: A Review of Their Synthesis Protocols and Structural and Magnetic Properties

Bhattacharyya

2015

J. Phys. Chem. C

121

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Magnetic nanoparticles (NPs) are prominent in various fields of scientific research and applications such as magnetic energy storage, magnetic fluids, biomedical fields, and catalysis. Metallic Fe NPs are difficult to protect from air oxidation, and iron oxide NPs suffer from reduced magnetization. Iron nitrides have the advantage of retaining high saturation magnetization (M S ); for example, α″-Fe 16 N 2 and γ′-Fe 4 N have average magnetic moments of 2.9 and 2 μ B /Fe, respectively, which are comparable to 2.2 μ B /Fe for α-Fe. The iron nitrides are ferromagnetic (FM) up to a maximum lattice dilution of 25% nitrogen for ε-Fe 3 N. Even though Fe−N NPs are extremely attractive as magnetic materials, the focus has been majorly on the bulk powders and thin films. This review provides a comprehensive overview of the crystal structures, nitriding kinetics, and synthesis methodologies of binary, doped, and ternary nanostructures, thin films, and bulk materials and their magnetism. Substitution of Fe by any other metal atom in the doped and ternary nanostructures breaks the long-range FM ordering but equally provides interesting low-temperature magnetic ordering such as spin glass and exchange bias. The dopant concentration dependence of the magnetic properties of the hybrid systems is discussed.

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Section: Synthesis Of Iron Nitridesmentioning

confidence: 99%

Section: Synthesis Of Iron Nitridesmentioning

confidence: 99%

Iron Nitride Family at Reduced Dimensions: A Review of Their Synthesis Protocols and Structural and Magnetic Properties

Bhattacharyya

2015

J. Phys. Chem. C

121

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“…2 at.% we systematically studied formation of Fe-N phases. The addition of small amount of Al or Ti has been reported to increase the thermal stability of Fe-N. 16,19,30,31 It may be noted that though the heat of formation of TiN and AlN is almost similar, 32 their affinity to N is different. 15 Therefore the mechanism by which addition of element X affects formation of Fe-N phases is not very clear.…”

Section: Introductionmentioning

confidence: 99%

Formation of iron nitride thin films with Al and Ti additives

Gupta

Tayal

Amir

et al. 2012

Journal of Applied Physics

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In this work we investigate the process of iron nitride (Fe-N) phase formation using 2 at.% Al or 2 at.% Ti as additives. The samples were prepared with a magnetron sputtering technique using different amount of nitrogen during the deposition process. The nitrogen partial pressure (\pn) was varied between 0-50% (rest Argon) and the targets of pure Fe, [Fe+Ti] and [Fe+Al] were sputtered. The addition of small amount of Ti or Al results in improved soft-magnetic properties when sputtered using \pn $\leq$ 10\p. When \pn is increased to 50\p non-magnetic Fe-N phases are formed. We found that iron mononitride (FeN) phases (N at% $\sim$50) are formed with Al or Ti addition at \pn =50% whereas in absence of such addition \eFeN phases (N\pat$\sim$30) are formed. It was found that the overall nitrogen content can be increased significantly with Al or Ti additions. On the basis of obtained result we propose a mechanism describing formation of Fe-N phases Al and Ti additives.Comment: 9 Pages, 7 Figure

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“…FeXN (X = Ta, Hf, Ti, Al, etc.) films are considered to be promising materials for their excellent soft magnetic properties, high saturation magnetization, and better reliabilities than the FeN films [6][7][8][9][10][11]. However, the uniaxial anisotropy fields of these films are typically below 20 Oe in the as-deposited states and can be reduced in annealing at the * Corresponding author.…”

Section: Introductionmentioning

confidence: 99%

Soft magnetic properties, high frequency characteristics, and thermal stability of co-sputtered FeCoTiN films

Zhang

Wang

Zhou

et al. 2009

Journal of Alloys and Compounds

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A study of sputtering process for nanocrystalline FeAlN soft magnetic thin films

Cited by 23 publications

References 12 publications

Iron Nitride Family at Reduced Dimensions: A Review of Their Synthesis Protocols and Structural and Magnetic Properties

Iron Nitride Family at Reduced Dimensions: A Review of Their Synthesis Protocols and Structural and Magnetic Properties

Formation of iron nitride thin films with Al and Ti additives

Soft magnetic properties, high frequency characteristics, and thermal stability of co-sputtered FeCoTiN films

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