A study of reticle CD behavior for inter-area pattern loading difference

Kim, Sungjin; Lee, Kweonjae; Yim, Jongsuk; Kim, Hyun‐Joong; Kim, Suk-Whan; Shin, Sukho; Choi, Woo Sik; Jung, Junhee; Chun, Kyungwha; Lee, In-Ja; Lee, Jooyoung; Hong, Hyeongsun; Jin, Gyoyoung

doi:10.1117/12.2196988

SPIE Proceedings

2015

DOI: 10.1117/12.2196988

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A study of reticle CD behavior for inter-area pattern loading difference

Sungjin Kim

Kweonjae Lee

Jongsuk Yim

et al.

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A study of reticle CD behavior for inter-area pattern loading difference

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