2011
DOI: 10.1088/0957-4484/22/39/395202
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A study of Joule heating-induced breakdown of carbon nanotube interconnects

Abstract: We investigate breakdown of carbon nanotube (CNT) interconnects induced by Joule heating in air and under high vacuum conditions (10(-5) mbar). A CNT with a diameter of 18 nm, which is grown by chemical vapor deposition to connect opposing titanium nitride (TiN) electrodes, is able to carry an electrical power up to 0.6 mW before breaking down under vacuum, with a corresponding maximum current density up to 8 × 10(7) A cm(-2) (compared to 0.16 mW and 2 × 10(7) A cm(-2) in air). Decoration with electrochemicall… Show more

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Cited by 42 publications
(35 citation statements)
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References 47 publications
(80 reference statements)
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“…In CNT fibers, current-induced Joule heating damages and ultimately breaks the fibers 31,32 . Figure 5a shows an SEM image of MF5 after electrical breakdown following the ampacity measurement.…”
Section: Discussionmentioning
confidence: 99%
“…In CNT fibers, current-induced Joule heating damages and ultimately breaks the fibers 31,32 . Figure 5a shows an SEM image of MF5 after electrical breakdown following the ampacity measurement.…”
Section: Discussionmentioning
confidence: 99%
“…The issue of heating in biased molecular junctions has attracted considerable recent experimental and theoretical attention, motivated by the relevance of this phenomenon to current induced chemical change and to junction stability. 78,79 This issue was addressed theoretically by several workers, [80][81][82][83][84][85][86][87][88][89][90][91][92][93][94][95][96][97][98] however the experimental observation of such heating 12,13,[99][100][101][102][103][104][105] depends on finding a suitable probe. First attempt to estimate junction heating 100,101 have used the threshold for bond breaking under tension as such a probe.…”
mentioning
confidence: 99%
“…However, if the SWNT in the device is suspended partially as displayed in Figure 1a–d, the situation is quite different. Since the thermal conductivity of air is quite smaller than silicon dioxide, the Joule heating is more liable to congregate at the suspended section of the SWNT 21, 33, 34. Thus, the nanoscale gaps can be controllably created adjacent to the electrodes at a sub‐40 nm wide region (sections ii and iv in Figure 1b–d).…”
Section: Resultsmentioning
confidence: 99%
“…Electroburning method has been used to create nanogaps in carbon nanotubes, which shows the disadvantage of uncontrollable position of the gaps 21. Alternatively, some other strategies are introduced to create nanogaps in carbon nanotubes, such as electron beam lithography and atomic force microscopy (AFM),6, 8, 22 which can precisely control the position of the nanogaps.…”
Section: Introductionmentioning
confidence: 99%