A Study of Group 13-Nitride Atomic Layer Deposition : Computational Chemistry Modelling of Atomistic Deposition Processes

Abstract

I and VI) and American Chemical Society (Paper II). Paper III and IV are published under CC BY 4.0 licenses.During the course of research underlying this thesis, Karl Rönnby was enrolled in Agora Materiae, a multidisciplinary doctoral program at Linköping University, Sweden.