A study of fused silica micro/nano patterning by focused-ion-beam

Li, Wuxia; Lalev, G.; Dimov, Stefan Simeonov; Zhao, Hong; Pham, Duc Truong

doi:10.1016/j.apsusc.2006.07.072

Cited by 22 publications

(9 citation statements)

References 23 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…, using masks of various kinds). However, here the films described above were engineered into several types of structures by machining lines through the film using the FIB method. − Examples of the structures formed are shown in Figure , imaged by AFM (Veeco Multimode with Nanoscope IIIa controller). The fabricated areas only occupy a very small part of the 10 × 10 mm crystal, each being around 30 μm 2 .…”

Section: Resultsmentioning

confidence: 99%

Effects of the Nanostructuring of Gold Films upon Their Thermal Stability

et al. 2010

Self Cite

View full text Add to dashboard Cite

We report results relating to the thermal stability of nanoparticles and show a remarkable effect of nanostructuring of the metal. Au films are nanostructured by focused ion beam sputtering (FIB) to produce isolated areas of metal, which are imaged by atomic force microscopy (AFM). Images of the surface show that, if the islands are made small enough, the metal in the islands is lost by evaporation, whereas the nonfabricated areas outside are relatively stable and the nanoparticles remain present there.

show abstract

Section: Resultsmentioning

confidence: 99%

Effects of the Nanostructuring of Gold Films upon Their Thermal Stability

et al. 2010

Self Cite

View full text Add to dashboard Cite

show abstract

“…However, it needs a mold that is made of ultraviolet transparent material such as quartz. Therefore, fabrication of quartz mold with submicron/ nanoscale structures becomes a critical technology for imprint (Ref 21,22); however, there has been only little study on FIB processing quartz material.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of 3-D Submicron Glass Structures by FIB

Chao

Shen

2009

J. of Materi Eng and Perform

View full text Add to dashboard Cite

The fabrication characteristic of focused ion beam (FIB) for Pyrex glass was investigated. FIB has several advantages such as high resolution, high material removal rates, low forward scattering, and direct fabrication in selective area without any etching mask. In this study, FIB-etched Pyrex glass was used for fast fabrication of 3-D submicron structures. A glass structure with 0.39 lm in width was fabricated. The experimental results in terms of limiting beam size, ion dose (ion/cm 2 ), and beam current are discussed. The influence of XeF 2 gas on FIB glass fabrication was investigated.

show abstract

“…This paper demonstrated that the microand nano-features machined by FIB micro-milling process can replace lithography-based pattern transfer techniques to fabricate Ni-based masters for injection molding and hot embossing. Li et al [97] further investigated machining capacity of FIB micro-milling for micro-and nano-features on fused silica substrates coated with a 15 nm thick Cr layer. Their study indicated that FIB micro-milling could also replace e-beam lithography for fabricating fused silica templates for UV nanoimprinting.…”

Section: Fib-machiningmentioning

confidence: 99%

Recent advances in micro- and nano-machining technologies

Gao

Huang

2017

Front. Mech. Eng.

View full text Add to dashboard Cite

Device miniaturization is an emerging advanced technology in the 21st century. The miniaturization of devices in different fields requires production of micro-and nano-scale components. The features of these components range from the sub-micron to a few hundred microns with high tolerance to many engineering materials. These fields mainly include optics, electronics, medicine, bio-technology, communications, and avionics. This paper reviewed the recent advances in micro-and nano-machining technologies, including micro-cutting, micro-electrical-discharge machining, laser micro-machining, and focused ion beam machining. The four machining technologies were also compared in terms of machining efficiency, workpiece materials being machined, minimum feature size, maximum aspect ratio, and surface finish.

show abstract

A study of fused silica micro/nano patterning by focused-ion-beam

Cited by 22 publications

References 23 publications

Effects of the Nanostructuring of Gold Films upon Their Thermal Stability

Effects of the Nanostructuring of Gold Films upon Their Thermal Stability

Fabrication of 3-D Submicron Glass Structures by FIB

Recent advances in micro- and nano-machining technologies

Contact Info

Product

Resources

About