A stretchable sensor platform based on simple and scalable lift-off micropatterning of metal nanowire network

Jeong, Dong-Wook; Jang, Nam-Su; Kim, Kang-Hyun; Kim, Jong-Man

doi:10.1039/c6ra15385b

Cited by 14 publications

(22 citation statements)

References 41 publications

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“…Direct fabrication of thin metallic films with high resolution features on PDMS is challenging 23 . The large coefficient of thermal expansion (CTE) (~0.31% per K) of PDMS compared to conventional photoresists causes significant expansion mismatch that results in the crack formation during lithography 24 – 27 . The alternate solution of using wet etching of the metal deposited on PDMS leads to undercutting due to the isotropic etching reaction, which restricts both the resolution and density of the electrodes 28 – 30 .…”

Section: Introductionmentioning

confidence: 99%

Nanofabrication of Conductive Metallic Structures on Elastomeric Materials

Tan

Rughoobur

Rubio‐Lara

et al. 2018

Sci Rep

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Existing techniques for patterning metallic structures on elastomers are limited in terms of resolution, yield and scalability. The primary constraint is the incompatibility of their physical properties with conventional cleanroom techniques. We demonstrate a reliable fabrication strategy to transfer high resolution metallic structures of <500 nm in dimension on elastomers. The proposed method consists of producing a metallic pattern using conventional lithographic techniques on silicon coated with a thin sacrificial aluminium layer. Subsequent wet etching of the sacrificial layer releases the elastomer with the embedded metallic pattern. Using this method, a nano-resistor with minimum feature size of 400 nm is fabricated on polydimethylsiloxane (PDMS) and applied in gas sensing. Adsorption of solvents in the PDMS causes swelling and increases the device resistance, which therefore enables the detection of volatile organic compounds (VOCs). Sensitivity to chloroform and toluene vapor with a rapid response (~30 s) and recovery (~200 s) is demonstrated using this PDMS nano-resistor at room temperature.

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Section: Introductionmentioning

confidence: 99%

Nanofabrication of Conductive Metallic Structures on Elastomeric Materials

Tan

Rughoobur

Rubio‐Lara

et al. 2018

Sci Rep

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“…Microcracks resulted from the differences in CTE remain unresolved to date based on known literatures. However, a recent work showed that these microcracks (typical width < 1 μm) do not present major concerns when patterning silver nanowires which are too large to penetrate through 50 Examples of gold patterning fabricated via wet etching have been shown by several authors. Meacham et al had constructed an elastic multi-electrode array based on PDMS with the method described above 51 .…”

Section: Repurposing Conventional Manufacturing Techniques For Stretcmentioning

confidence: 99%

Needs and Enabling Technologies for Stretchable Electronics Commercialization

et al. 2017

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Stretchable electronics represent an emerging class of devices that can be compressed, twisted and conform to very complicated shapes. The mechanical and electrical compliances of the technology promise to open up applications for healthcare, energy and entertainment purposes. However, advancement in the field has been hindered by material related constraints. Moreover, the current microfabrication facilities are optimized for rigid substrates such as silicon, which have significant different properties compared to elastomers. In this paper, four categories of enabling technologies for stretchable electronics commercialization are critically reviewed, namely: the novel design of stretchable structures, use of non-conventional materials, state-of-art printing techniques and also the patterning of electrodes or metal interconnects via conventional manufacturing techniques.

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“…Jeong et al . reported reliable micropatterning method of AgNWs by the combination of lift-off process and spray coating process 33 . In addition, Ahn et al .…”

Section: Introductionmentioning

confidence: 99%

A Simple Silver Nanowire Patterning Method Based on Poly(Ethylene Glycol) Photolithography and Its Application for Soft Electronics

Kim

et al. 2017

Sci Rep

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Hydrogel-based flexible microelectrodes have garnered considerable attention recently for soft bioelectronic applications. We constructed silver nanowire (AgNW) micropatterns on various substrates, via a simple, cost-effective, and eco-friendly method without aggressive etching or lift-off processes. Polyethylene glycol (PEG) photolithography was employed to construct AgNW patterns with various shapes and sizes on the glass substrate. Based on a second hydrogel gelation process, AgNW patterns on glass substrate were directly transferred to the synthetic/natural hydrogel substrates. The resultant AgNW micropatterns on the hydrogel exhibited high conductivity (ca. 8.40 × 103 S cm−1) with low sheet resistance (7.51 ± 1.11 Ω/sq), excellent bending durability (increases in resistance of only ~3 and ~13% after 40 and 160 bending cycles, respectively), and good stability in wet conditions (an increase in resistance of only ~6% after 4 h). Considering both biocompatibility of hydrogel and high conductivity of AgNWs, we anticipate that the AgNW micropatterned hydrogels described here will be particularly valuable as highly efficient and mechanically stable microelectrodes for the development of next-generation bioelectronic devices, especially for implantable biomedical devices.

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A stretchable sensor platform based on simple and scalable lift-off micropatterning of metal nanowire network

Abstract: We describe a simple, precise and scalable micropatterning approach of conductive nanomaterials (CNs) based on a synergetic combination of lift-off process and wet coating of CNs.

Cited by 14 publications

References 41 publications

Nanofabrication of Conductive Metallic Structures on Elastomeric Materials

Nanofabrication of Conductive Metallic Structures on Elastomeric Materials

Needs and Enabling Technologies for Stretchable Electronics Commercialization

A Simple Silver Nanowire Patterning Method Based on Poly(Ethylene Glycol) Photolithography and Its Application for Soft Electronics

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