2016
DOI: 10.1016/j.cma.2016.07.042
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A stochastic multi-scale approach for the modeling of thermo-elastic damping in micro-resonators

Abstract: The aim of this work is to study the thermo-elastic quality factor (Q) of micro-resonators with a stochastic multi-scale approach. In the design of high-Q micro-resonators, thermo-elastic damping is one of the major dissipation mechanisms, which may have detrimental effects on the quality factor, and has to be predicted accurately. Since material uncertainties are inherent to and unavoidable in micro-electromechanical systems (MEMS), the effects of those variations have to be considered in the modeling in orde… Show more

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Cited by 13 publications
(23 citation statements)
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“…Details on this iterative process, with convergence improvements as compared with the literature, can be found in [37]. The properties of interest are then obtained by following the reverse path of Equations (70)-(73).…”
Section: Non-gaussian Extensionmentioning
confidence: 99%
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“…Details on this iterative process, with convergence improvements as compared with the literature, can be found in [37]. The properties of interest are then obtained by following the reverse path of Equations (70)-(73).…”
Section: Non-gaussian Extensionmentioning
confidence: 99%
“…Finally, results obtained for different lengths of the plate are shown in Figure 30(c), where it can be seen that the uncertainty of the resonance frequency decreases with the length of the plate. However, considering a more realistic anchor of the MEMS than a perfect clamp, as performed in [37], could change this conclusion.…”
Section: The Effect Of the Plate Dimensionsmentioning
confidence: 99%
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“…As each grain has a different size, the thermal conductivity for each grain needs to be estimated and is given in Tab. 1, see [48].…”
Section: Thermal Homogenizationmentioning
confidence: 99%
“…As the computation time increases with the RVE size, it is important to provide a critical size of the RVE allowing to capture the homogenized behavior at a reasonable computational cost [9,26,28]. However lack of representativeness of the volume element can also be exploited in order to study the material uncertainties on Statistical Volume Elements (SVEs) [38,27], allowing defining meso-scale random fields [39][40][41][42][43][44][45], or propagating material uncertainties to the structural behavior [40,[46][47][48].…”
Section: Introductionmentioning
confidence: 99%