A spectrum matching light source with an improved spectral resolution, throughput, and matching fidelity

Wang, Qingsong; Saito, Kosuke; Cutler, Alex; Grube, William L.; Schiller, Craig M.; Zhou, Jing; Murray, Jonathan; McDaniel, Don; Gustafson, Deborah; Zhu, Hui‐Ling

doi:10.1117/12.2610181

Cited by 4 publications

(4 citation statements)

References 6 publications

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“…The LDLS is coupled through two fiber channels, one for VIS covering 380-780nm and the other for NIR covering 700-1100nm. Broadband light beams from both channels are diffracted with the same image forming grating and the diffracted spectra are imaged side by side on the same DMD [10][11]. A system characterization process is described in detail to obtain the spectral light distribution on the DMD.…”

Section: Introductionmentioning

confidence: 99%

The characterization and matching algorithm of LDLS-based broadband spectrum matching light source

Zhou,

Wang,

Saito

et al. 2024

Photonic Instrumentation Engineering XI

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The spectral wavelength range is expanded to 380nm -1100nm for the laser driven light sources (LDLS) based spectral matching light source. Unlike LED-based systems, which individually adjust the output of many LEDs with various center wavelengths, the new source programmatically changes the mirror on/off pattern of a digital micromirror device (DMD) onto which the broadband LDLS light is diffracted and imaged. The LDLS-based system offers higher matching accuracy with faster switching speed due to its superior spectral resolution, higher throughput over the entire interested spectral range as well as the high switching speed of the micromirrors. The DMD's light distribution data obtained through system characterization is fed into the matching algorithm to calculate the mirror fraction and generate the appropriate mirror pattern to match the target spectrum. Thus, the matching quality relies on whether the characterization data captures the light mapping features on the DMD both spectrally and spatially with acceptable S/N. This paper presents an automatic process to characterize the DMD's light distribution spectrally and spatially. Then, the data will be used in the matching algorithm based on linear least square optimization with constraint to calculate the mirror fraction and generate the appropriate mirror pattern to minimize the difference between the calculated and the target spectrum. The impact of characterization configurations such as row and column pixel widths on the matching accuracy for the various types of target spectrum will be discussed.

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Section: Introductionmentioning

confidence: 99%

The characterization and matching algorithm of LDLS-based broadband spectrum matching light source

Zhou,

Wang,

Saito

et al. 2024

Photonic Instrumentation Engineering XI

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“…On the other hand, when coupled with a classical monochromator, it outputs monochromatic light with a selectable center wavelength and high coupling efficiency across UV-VIS-IR (TLS). Recently a spectral matching light source (CSE) using LDLS and a digital micromirror device (DMD) has been developed to tune not only the center wavelength but also the output intensity so that it can generate any spectral output programmatically with high fidelity and decent flux [9]. Both LDLS based advanced light sources meet the testing demands of increasingly sophisticated sensors include multi-channel ambient light sensors and integrated sensor modules with better spectral resolution, higher throughput, repeatability, stability, and accuracy.…”

Section: Introductionmentioning

confidence: 99%

Dual fiber coupled laser-driven light source

Zhou,

Wang,

Foley

et al. 2023

Novel Optical Systems, Methods, and Applications XXVI

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Laser-driven light sources (LDLS) have been gaining popularity in semiconductor metrology and spectroscopic measurement in the past 20 years because of their much higher brightness across a broad spectral range with higher stability than traditional electrode-based lamps. In addition, fiber-coupled LDLS systems offer more flexibility and convenience than free-spaced ones. However, due to the limited NA of fiber coupling optics, only light output from one side of a Xe plasma bulb is coupled to the fiber port, with light emitted into the opposite side of the Xe bulb wasted. To address this issue, a dual fiber coupling system is designed and implemented to collect the photons from both sides of a Xe plasma bulb. This paper will present the optical design of EQ-99 based LDLS lamp head with two fiber-coupled ports, the elliptical mirror alignment and optimization, and the performance of both fiber ports' output, including power spectrum, beam profile, and stability. Besides the total light power from two fiber ports being nearly doubled with the same laser power driver, the mirror coatings and output windows can be individually configured and optimized for different spectral ranges, which can be useful for broadband applications. One good example is its integration into the extended range CSE system to obtain a decent output flux covering 350 to 1100nm.

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“…Energetiq's broadband spectrum matching light source (Chromatic Spectral Engine (CSE)) with the visible range of 380nm to 800nm has been successful in unlimited spectral profile matching in the visible range [1]. With new requirements from applications and customers [2,3,4,5,6,7,8,9,10], the wavelength range is extended from the range of 380nm ~ 800nm to 1100nm.…”

Section: Introductionmentioning

confidence: 99%

A 380-1100nm spectrum matching light source with high spectral resolution, throughput, speed, and stability

Wang,

Saito,

Zhou

et al. 2023

Novel Optical Systems, Methods, and Applications XXVI

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A broadband spectrum matching light source with a visible to near-infrared (NIR) wavelength range is a valuable tool for broad applications. Based on Energetiq's early version of spectrum matching light source covering the visible wavelength range (380 to 800nm), we extended the range of spectral matching to 1100nm. The new source has two input beam channels for the visible and NIR light from a single Energetiq LDLS light source. The two beams share the same grating, the digital mirror device (DMD), and the optical path. This innovative design extends the wavelength range with a smooth spectral transition. The new system has a compact system size with a 6.5mm diameter liquid light guide output.The light source has a 5.3nm full-width-half-maximum (FWHM) linewidth from 380 to 800nm and about 11nm FWHM between 680 and 1100nm, based on the input fiber size selection. With its high resolution, the source can be a valuable tool for sensor calibration, hyperspectral imaging, spectroscopy, and biomedical-related applications, which also need to consider the ambient light or NIR light effects and simulate the detailed spectral profiles of arbitrary light sources with more extended wavelength range and high fidelity. The source throughput, switching speed, and output stability will also be discussed.

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A spectrum matching light source with an improved spectral resolution, throughput, and matching fidelity

Cited by 4 publications

References 6 publications

The characterization and matching algorithm of LDLS-based broadband spectrum matching light source

The characterization and matching algorithm of LDLS-based broadband spectrum matching light source

Dual fiber coupled laser-driven light source

A 380-1100nm spectrum matching light source with high spectral resolution, throughput, speed, and stability

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