Carbon nanotubes (CNTs) and epitaxial
graphene on SiC substrates formed by thermal decomposition are of
great interest for electronic and optoelectronic applications. The
initial decomposition process of a SiC surface is critical to the
formation of subsequent nanocarbon materials, such as CNTs or graphene.
We present here an in situ near-edge X-ray absorption fine structure
(NEXAFS) spectroscopy study of the initial formation processes of
CNTs on the SiC C-face and graphene on the Si-face by thermal decomposition
at high temperature. On both surfaces, desorption of Si atoms and
subsequent graphitization of the remaining carbon atoms were observed
above 1000 °C by carbon K-edge NEXAFS measurements
in real time, but the incidence angle dependence of NEXAFS spectra
showed marked difference between the SiC C-face and Si-face; on the
SiC Si-face, the orientations of graphene layers are kept parallel
to the surface during the graphene growth. In contrast, on the SiC
C-face, graphene layers are initially oriented parallel to the SiC
surface, but their orientations change toward the surface normal during
the progression of CNT formation above 1300 °C. In addition,
at the very initial stage of thermal decomposition, aromatic fragments
composed of a few carbon hexagons are present parallel to the surface.
Our NEXAFS results are consistent with previous density-functional
tight-binding molecular dynamic simulations for CNT growth on the
SiC C-face by thermal decomposition.