2009
DOI: 10.1016/j.jhazmat.2008.06.029
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A solvent extraction approach to recover acetic acid from mixed waste acids produced during semiconductor wafer process

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Cited by 34 publications
(14 citation statements)
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References 6 publications
(7 reference statements)
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“…Ideally, a process is required to separate the acids alone and recycle the remaining materials back to earlier stages in the process. The separation of acetic acid from water has been explored for many years, with various technologies being developed such as fractional distillation, azeotropic dehydration distillation [47], solvent extraction [48], combination of the above methods, extractive distillation [49,50], and adsorption [51].…”
Section: Product Recovery and Purificationmentioning
confidence: 99%
“…Ideally, a process is required to separate the acids alone and recycle the remaining materials back to earlier stages in the process. The separation of acetic acid from water has been explored for many years, with various technologies being developed such as fractional distillation, azeotropic dehydration distillation [47], solvent extraction [48], combination of the above methods, extractive distillation [49,50], and adsorption [51].…”
Section: Product Recovery and Purificationmentioning
confidence: 99%
“…Glycolaldehyde up to 85 % could be recovered in a multistage cross-current back-extraction with water [184]. Physical extraction using organic solvents has also been widely studied to extract acetic acid from the aqueous fraction [56,60,85,170]. However, physical extraction is thought to be rather ineffective, because the distribution coefficients are remarkably low and almost temperature independent [68,81].…”
Section: Pyrolysis Oil: a Viable Source For Platform Chemicalsmentioning
confidence: 99%
“…The semiconductor production process usually comprises deposition, resist coating, light exposure, etching, resist removal, and rinsing, which generate considerable acid waste [2]. More than 200 high-purity organic and inorganic compounds and large quantities of ultrapure water are used during the production of semiconductor chips [3].…”
Section: Introductionmentioning
confidence: 99%