2002
DOI: 10.1016/s0040-6090(02)00543-6
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A solid-state electrolyte lithium phosphorus oxynitride film prepared by pulsed laser deposition

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Cited by 113 publications
(104 citation statements)
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“…[ 15 ] A second method for the formation of LIPON is pulsed laser deposition, in which also both the nitrogen partial pressure and the laser power infl uence the ionic conductivity. [ 120 ] A third method that was reported to yield ionically conductive LIPON fi lms is ion-beam assisted deposition (IBAD). [ 121 , 122 ] LIPON fi lms have very high ionic conductivities compared to other inorganic solid-state electrolytes: up to 3 ⋅ 10 − 6 S ⋅ cm − 1 of VO 2 (sol-gel coating, [ 85 ] RF sputter deposition, [ 86 ] pulsed laser deposition [ 82 ] and chemical vapor deposition [ 87 ] ).…”
Section: Lithium Phosphate Based Electrolytesmentioning
confidence: 99%
“…[ 15 ] A second method for the formation of LIPON is pulsed laser deposition, in which also both the nitrogen partial pressure and the laser power infl uence the ionic conductivity. [ 120 ] A third method that was reported to yield ionically conductive LIPON fi lms is ion-beam assisted deposition (IBAD). [ 121 , 122 ] LIPON fi lms have very high ionic conductivities compared to other inorganic solid-state electrolytes: up to 3 ⋅ 10 − 6 S ⋅ cm − 1 of VO 2 (sol-gel coating, [ 85 ] RF sputter deposition, [ 86 ] pulsed laser deposition [ 82 ] and chemical vapor deposition [ 87 ] ).…”
Section: Lithium Phosphate Based Electrolytesmentioning
confidence: 99%
“…At these decreased synthesis temperatures, the low-temperature phase b-Li 10 P 4 N 10 became accessible. After optimization,i tc ould be synthesized according to Equations (1), (2), (3), or (4). For all of these routes,w eu sed a Li 3 Nf lux or self-flux,i no pen Ta crucibles sealed in silica ampoules under argon or nitrogen atmosphere, with different excesses of Li 3 No rL i 7 PN 4 as appropriate.…”
Section: Synthesismentioning
confidence: 99%
“…[1][2][3][4][5][6] Nitridophosphates are of particular interest due to their structural variability.T he ability to form different linking patterns of corner-and/oredge-sharing PN 4 tetrahedra as primary building units leads to av ariety of complex structures and allows materials to be optimized for many purposes. [7][8][9][10][11] Synthetic approaches to nitridophosphates are somewhat challenging due to the limited thermal stability of the starting materials (e.g.,P 3 N 5 decomposes above 850 8C).…”
Section: Introductionmentioning
confidence: 99%
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