A soft Plasma Enhanced-Chemical Vapor Deposition process for the tailored synthesis of SiO2 films

Barreca, Davide; Gasparotto, Alberto; Maccato, Chiara; Tondello, Eugenio; Rossetto, G.

doi:10.1016/j.tsf.2008.02.029

Cited by 12 publications

(17 citation statements)

References 32 publications

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“…This SiO 2 ‐like coated polymer, when moved to the discharge end, is not modified by the non‐depositing species. The high quality layers obtained by APGD‐CVD makes it a potential candidate for demanding applications 45–47…”

Section: Resultsmentioning

confidence: 99%

High Quality SiO₂‐like Layers by Large Area Atmospheric Pressure Plasma Enhanced CVD: Deposition Process Studies by Surface Analysis

Premkumar

Starostin

Vries

et al. 2009

Plasma Processes & Polymers

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This work reports on the main competing processes and their contribution to the properties of SiO2 layers on polymers in large area AP‐PE‐CVD from ArN2O2‐HMDSO mixtures. The detailed space resolved surface analysis on the statically deposited films showed smooth SiOx films in the vicinity of the gas injection, as deposited by HMDSO radicals. At the gas effluent, due to HMDSO depletion, non‐depositing species interact with the polymer and induce rough deposits with high carbon content. The competition of plasma–polymer surface interaction with HMDSO radicals deposition, is further confirmed from the analysis of films grown on polymers with a “protecting” layer and with reverse gas flow direction. Under web roll conditions, HMDSO radicals deposition is dominant, resulting in high quality SiOx layers along the whole electrode length.

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Section: Resultsmentioning

confidence: 99%

High Quality SiO₂‐like Layers by Large Area Atmospheric Pressure Plasma Enhanced CVD: Deposition Process Studies by Surface Analysis

Premkumar

Starostin

Vries

et al. 2009

Plasma Processes & Polymers

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“…46 Field emission-scanning electron microscopy (FE-SEM) analyses were performed by means of a Zeiss SUPRA 40 VP apparatus equipped with an Oxford INCA x-sight X-ray detector for energy dispersive X-ray spectroscopy (EDXS) investigation, operating at primary beam acceleration voltages between 10.0 and 20.0 kV. 46 Field emission-scanning electron microscopy (FE-SEM) analyses were performed by means of a Zeiss SUPRA 40 VP apparatus equipped with an Oxford INCA x-sight X-ray detector for energy dispersive X-ray spectroscopy (EDXS) investigation, operating at primary beam acceleration voltages between 10.0 and 20.0 kV.…”

Section: Chemico-physical Characterizationmentioning

confidence: 99%

Fe₂O₃–TiO₂nanosystems by a hybrid PE-CVD/ALD approach: controllable synthesis, growth mechanism, and photocatalytic properties

et al. 2015

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nanocomposites are fabricated by an original vapor phase synthetic strategy, consisting of the initial growth of Fe 2 O 3 nanosystems on fluorine-doped tin oxide substrates by plasma enhanced-chemical vapor deposition, followed by atomic layer deposition of TiO 2 overlayers with variable thickness, and final thermal treatment in air. A thorough characterization of the target systems is carried out by X-ray diffraction, atomic force microscopy, field emission-scanning electron microscopy, energy dispersive X-ray spectroscopy, transmission electron microscopy, and X-ray photoelectron spectroscopy. High purity nanomaterials characterized by the co-presence of Fe 2 O 3 (hematite) and TiO 2 (anatase), with an intimate Fe 2 O 3 -TiO 2 contact, are successfully obtained. In addition, photocatalytic tests demonstrate that, whereas both single-phase oxides do not show appreciable activity, the composite systems are able to degrade methyl orange aqueous solutions under simulated solar light, and even visible light, with an efficiency directly dependent on TiO 2 overlayer thickness. This finding opens attractive perspectives for eventual applications in wastewater treatment. CrystEngCommThis journal is

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“…1 In fact, -OH contributions give typically raise to a signal with BEs very close to the one of lattice oxygen in SiO 2 . 19 The TGA analyses of SiO 2 @AeThio (Fig. S5 †) showed three regions of mass loss: 40-160 C (adsorbed water and ethanol), 160-500 C (organic material), and 500-800 C (mainly dehydration of Si-OH groups).…”

Section: Synthesis Of Sio 2 @Aethiomentioning

confidence: 99%

“…4e) photoelectron peaks, that were located at average BE values of 532.4 eV and 102.9 eV, respectively. 13,19 In the case of oxygen, the contribution of O atoms in the ligand chains could not be resolved with respect to that of SiO 2 . The calculated O/Si atomic ratio (2.9), higher than the theoretical one expected for SiO 2 , could be traced back both to the surface functionalization and, mostly, to air exposure and consequent water adsorption, as already reported for similar systems.…”

Section: Synthesis Of Sio 2 @Aethiomentioning

confidence: 99%

Functionalization of silica through thiol-yne radical chemistry: a catalytic system based on gold nanoparticles supported on amino-sulfide-branched silica

et al. 2016

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A soft Plasma Enhanced-Chemical Vapor Deposition process for the tailored synthesis of SiO2 films

Cited by 12 publications

References 32 publications

High Quality SiO₂‐like Layers by Large Area Atmospheric Pressure Plasma Enhanced CVD: Deposition Process Studies by Surface Analysis

High Quality SiO₂‐like Layers by Large Area Atmospheric Pressure Plasma Enhanced CVD: Deposition Process Studies by Surface Analysis

Fe₂O₃–TiO₂nanosystems by a hybrid PE-CVD/ALD approach: controllable synthesis, growth mechanism, and photocatalytic properties

Functionalization of silica through thiol-yne radical chemistry: a catalytic system based on gold nanoparticles supported on amino-sulfide-branched silica

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A soft Plasma Enhanced-Chemical Vapor Deposition process for the tailored synthesis of SiO2 films

Cited by 12 publications

References 32 publications

High Quality SiO2‐like Layers by Large Area Atmospheric Pressure Plasma Enhanced CVD: Deposition Process Studies by Surface Analysis

High Quality SiO2‐like Layers by Large Area Atmospheric Pressure Plasma Enhanced CVD: Deposition Process Studies by Surface Analysis

Fe2O3–TiO2nanosystems by a hybrid PE-CVD/ALD approach: controllable synthesis, growth mechanism, and photocatalytic properties

Functionalization of silica through thiol-yne radical chemistry: a catalytic system based on gold nanoparticles supported on amino-sulfide-branched silica

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Product

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High Quality SiO₂‐like Layers by Large Area Atmospheric Pressure Plasma Enhanced CVD: Deposition Process Studies by Surface Analysis

High Quality SiO₂‐like Layers by Large Area Atmospheric Pressure Plasma Enhanced CVD: Deposition Process Studies by Surface Analysis

Fe₂O₃–TiO₂nanosystems by a hybrid PE-CVD/ALD approach: controllable synthesis, growth mechanism, and photocatalytic properties