A Six-Probe Scanning Method for Guide Rail Straightness Measurement

Yang, Jiao Jiao; Chen, Xin; Ding, Gui Fu; Lei, Li Hua; Li, Yuan

doi:10.4028/www.scientific.net/amm.217-219.2669

Cited by 4 publications

(4 citation statements)

References 4 publications

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“…The differential values in Equations (19) and (20) are also integrated by Equations (7) and (8). It can be seen that there is one more component α due to the zero-adjustment error in m f and mg in Equations (19) and (20), which cause a rotation of the reconstruction profiles compared with the actual profiles and the tangent value of the rotation angle is α.…”

Section: The Effect Of the Zero-adjustment Errormentioning

confidence: 99%

“…As in many types of ultra-precision equipment, linear motions are orientated by guide rails or parallel planes, whose accuracies can have a great influence on the smooth operations. On the basis of those mentioned methods, several measuring systems and methods were designed to measure and reconstruct a pair of parallel profiles including the cylinder workpiece and guide rails [18][19][20]. We also designed a four-probe method to reconstruct a pair of profiles, which can eliminate the reference errors and the zero-adjustment error through two scannings [21].…”

Section: Introductionmentioning

confidence: 99%

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A Four-Probe Method Using Different Probe Spacings for Measurement and Exact Reconstruction of Parallel Profiles

et al. 2019

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To realize the measurement and exact reconstruction of a pair of parallel profiles, a new scanning method using four displacement sensors as probes and different probe spacings has been invented with the advantage of preventing data processing error. The measuring device is placed between the measured objects and moved by a scanning stage to collect measurement data of both measured profiles. Considering many existing methods, the high lateral resolution of the reconstruction result and the rejection of the data processing error cannot always be achieved at the same time. When the measured profiles are in the short wavelength range, data processing errors are often on the same order of magnitude as the height difference of the measured profiles. The new method can eliminate both the straightness error of the measurement reference and the data processing error. The exact reconstruction retaining the high lateral resolution and without data processing error can be realized by rational position arrangement of sensors and corresponding processing method of the measurement data. The new method possesses the following advantages: (i) achievement of the exact reconstruction without data processing error; (ii) high lateral resolution not limited by probe spacing; (iii) concise operation without zero calibration of probes; and (iv) suitability for on-machine measurement. The feasibility and advantages of the new method were demonstrated by theoretical analyses, simulations, and experimental results.

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Section: The Effect Of the Zero-adjustment Errormentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

A Four-Probe Method Using Different Probe Spacings for Measurement and Exact Reconstruction of Parallel Profiles

et al. 2019

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“…Hence, various techniques have been investigated to measure the error motion signals of a driving device for compensation. The multi-probe error separation technique (MPEST) is one of the methods developed for the precision measurement of error motion signals [2][3][4][5][6][7][8][9][10][11]. The MPEST, which has been reported by many researchers in recent years, offers many advantages, such as high accuracy, ease of use, non-requirement for additional precision equipment, and excellent applicability, including for on-machine measurements.…”

Section: Introductionmentioning

confidence: 99%

Precision profile measurement of disc surface by error motion compensation

Hwang

Seo²,

Cho³

2022

Meas. Sci. Technol.

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In this study, a precision measurement method to obtain the surface profile of a rotating disc is proposed. To improve the accuracy of the estimated profile, the 3-DOF error motion included in the measured surface profile signal is simultaneously estimated and compensated. The profile of the disc is measured using a surface measuring unit equipped with one displacement sensor, and the error motion of the rotating component is measured using an error motion measuring unit equipped with a four-probe system. The developed error motion measuring unit uses a four-probe error separation technique, and the effect of zero setting errors between the probes on the compensated surface profile is analyzed. Subsequently, a process to remove the effect is proposed. To confirm the performance of the proposed method, numerical verification tests and experiments are performed using test equipment. The numerical verification tests show that the developed measuring system affords accurate shape estimation and is not affected by zero setting errors between probes. The experimental results confirm that the proposed method removes the effect of error motion and improves the precision by a factor of 1.5, compared with the measurement result obtained using a general single displacement sensor.

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“…be divided into laser and optical video probes. The scanning probe has both aiming and micrometering functions [6][7][8][9]. For the development of scanning probes, their guiding mechanisms should have no friction, no return error, high sensitivity, and good linearity.…”

Section: Introductionmentioning

confidence: 99%

Coupling error model for the contact probe of a three-dimensional screw thread-measuring machine

Yu¹,

Yang²,

Cai³

et al. 2022

Meas. Sci. Technol.

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Coupling error is an important factor that affects the measurement accuracy of the contact scanning probe of a three-dimensional thread-measuring machine. To address this issue, this paper proposes a coupling error model for contact scanning probes. First, the mechanical structure of the contact scanning probe was introduced, and the main source of its coupling error was analyzed. Second, material mechanics was used to conduct a geometry–force analysis on the guiding mechanism of the probe, thereby establishing a coupling error model. Finally, the experiments were carried out to verify the accuracy of the coupling error model. From the experimental verification, the movement of the measuring head by 10 μm increased the deviation of the probe displacement by 2 μm, indicating the probe deflection. Moreover, the calculated probe deflection angle was consistent with the theoretical value, validating the proposed coupling error model. This method provides an important theoretical basis for the decoupling of measuring probe, thereby improving the accuracy of the probe guiding mechanism.

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A Six-Probe Scanning Method for Guide Rail Straightness Measurement

Cited by 4 publications

References 4 publications

A Four-Probe Method Using Different Probe Spacings for Measurement and Exact Reconstruction of Parallel Profiles

A Four-Probe Method Using Different Probe Spacings for Measurement and Exact Reconstruction of Parallel Profiles

Precision profile measurement of disc surface by error motion compensation

Coupling error model for the contact probe of a three-dimensional screw thread-measuring machine

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