A single W/B_4C transmission multilayer for polarization analysis of soft x-rays up to 1keV

MacDonald, Michael A.; Schäfers, F.; Gaupp, A.

doi:10.1364/oe.17.023290

Cited by 35 publications

(15 citation statements)

References 26 publications

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“…Phase retarding optics based on multilayers, used with linear polarizers to resolve circular from unpolarized radiation or to convert linear to elliptical polarization, are even more challenging in the soft x-ray range due to low efficiency and chromaticity [10,14,15]. Circular polarizers utilizing magnetic circular dichroism have been demonstrated [16,17,18] and are also very chromatic.…”

Section: Theoretical and Practical Considerationsmentioning

confidence: 99%

Resonant soft X-ray and extreme ultraviolet magnetic scattering in nanostructured magnetic materials: Fundamentals and directions

Kortright¹

2013

Journal of Electron Spectroscopy and Related Phenomena

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Theoretical and practical aspects of resonant magnetic and charge scattering in the soft x-ray and extreme ultraviolet spectral range are reviewed. Intensity-only measurements are considered because they are more efficient than polarization-resolving measurements. Two very different approaches are discussed and compared; transmission small-angle scattering described by a simple kinematical scattering model and specular reflection described by more complex yet standard magneto-optical formalisms. In both cases the scattered intensity is seen to contain distinct terms resulting from pure-charge scattering, puremagnetic scattering, and charge-magnetic cross-terms, and emphasis is placed on distinguishing these contributions via their energy spectra and its dependence on incident polarization. Combined with measurements vs. scattering vector q, both approaches provide significant capability to resolve magnetic and chemical structure down to nanometer length scales. The role of and need for modeling to obtain reliable information from data is discussed, as are current directions and opportunities.

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Section: Theoretical and Practical Considerationsmentioning

confidence: 99%

Resonant soft X-ray and extreme ultraviolet magnetic scattering in nanostructured magnetic materials: Fundamentals and directions

Kortright¹

2013

Journal of Electron Spectroscopy and Related Phenomena

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“…The polarization of the radiation was set to right-hand circular polarized light (RCP, σ -), i.e. the Stokes parameter is S 3 =-1 according to our convention [7]. The ratio of R p /R s from the reflectivity measurement was set to this fixed value while fitting the polarimetry equation [8].…”

Section: Resultsmentioning

confidence: 99%

EUV Ellipsometry on Mo/Si Multilayers

Uschakow¹,

Gaupp²,

MacDonald

et al. 2013

J. Phys.: Conf. Ser.

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“…Currently at BESSY-II two experimental stations, a small reflectometer (Schä fers & Cimino, 2013) and a polarimeter (Schä fers et al, 1999), are in operation, which have been used for many years for at-wavelength reflectometry (Schä fers et al, 1998;Chkhalo et al, 2013), polarimetry (MacDonald et al, 2009;Gaupp et al, 2013) and ellipsometry measurements.…”

Section: Issn 1600-5775mentioning

confidence: 99%

The at-wavelength metrology facility for UV- and XUV-reflection and diffraction optics at BESSY-II

et al. 2016

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A technology center for the production of high-precision reflection gratings has been established. Within this project a new optics beamline and a versatile reflectometer for at-wavelength characterization of UV-and XUV-reflection gratings and other (nano-) optical elements has been set up at BESSY-II. The Plane Grating Monochromator beamline operated in collimated light (c-PGM) is equipped with an SX700 monochromator, of which the blazed gratings (600 and 1200 lines mm À1 ) have been recently exchanged for new ones of improved performance produced in-house. Over the operating range from 10 to 2000 eV this beamline has very high spectral purity achieved by (i) a four-mirror arrangement of different coatings which can be inserted into the beam at different angles and (ii) by absorber filters for high-order suppression. Stray light and scattered radiation is removed efficiently by double sets of in situ exchangeable apertures and slits. By use of in-and off-plane bending-magnet radiation the beamline can be adjusted to either linear or elliptical polarization. One of the main features of a novel 11-axes reflectometer is the possibility to incorporate real life-sized gratings. The samples are adjustable within six degrees of freedom by a newly developed UHV-tripod system carrying a load up to 4 kg, and the reflectivity can be measured between 0 and 90 incidence angle for both s-and p-polarization geometry. This novel powerful metrology facility has gone into operation recently and is now open for external users. First results on optical performance and measurements on multilayer gratings will be presented here.

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A single W/B_4C transmission multilayer for polarization analysis of soft x-rays up to 1keV

Cited by 35 publications

References 26 publications

Resonant soft X-ray and extreme ultraviolet magnetic scattering in nanostructured magnetic materials: Fundamentals and directions

Resonant soft X-ray and extreme ultraviolet magnetic scattering in nanostructured magnetic materials: Fundamentals and directions

EUV Ellipsometry on Mo/Si Multilayers

The at-wavelength metrology facility for UV- and XUV-reflection and diffraction optics at BESSY-II

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