A single crystal silicon micro-Pirani vacuum gauge with high aspect ratio structure

Jiang, Wei; Wang, Xin; Zhang, Jinwen

doi:10.1016/j.sna.2010.08.015

Cited by 22 publications

(10 citation statements)

References 11 publications

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“…In such a device, the heater and the heat sink are usually prepared from the same material layer. Therefore, this type of Pirani sensor has advantages including ease to manufacture [78][79][80][81].…”

Section: Lateral Heat Transfer Configurationmentioning

confidence: 99%

“…Gas heat conduction is transferred horizontally from the heater to the heat sink. Figure 4b illustrates a sensor of this type reported by Jiang et al [78], in this sensor, the heater and the heat sink were both prepared from a single crystal silicon layer. The heater was designed in a serpentine shape and fixed between two comb-shaped heat sinks.…”

Section: Lateral Heat Transfer Configurationmentioning

confidence: 99%

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Overview of the MEMS Pirani Sensors

Zhou

Shi

et al. 2022

Micromachines

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Vacuum equipment has a wide range of applications, and vacuum monitoring in such equipment is necessary in order to meet practical applications. Pirani sensors work by using the effect of air density on the heat conduction of the gas to cause temperature changes in sensitive structures, thus detecting the pressure in the surrounding environment and thus vacuum monitoring. In past decades, MEMS Pirani sensors have received considerable attention and practical applications because of their advances in simple structures, long service life, wide measurement range and high sensitivity. This review systematically summarizes and compares different types of MEMS Pirani sensors. The configuration, material, mechanism, and performance of different types of MEMS Pirani sensors are discussed, including the ones based on thermistors, thermocouples, diodes and surface acoustic wave. Further, the development status of novel Pirani sensors based on functional materials such as nanoporous materials, carbon nanotubes and graphene are investigated, and the possible future development directions for MEMS Pirani sensors are discussed. This review is with the purpose to focus on a generalized knowledge of MEMS Pirani sensors, thus inspiring the investigations on their practical applications.

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Section: Lateral Heat Transfer Configurationmentioning

confidence: 99%

Section: Lateral Heat Transfer Configurationmentioning

confidence: 99%

Overview of the MEMS Pirani Sensors

Zhou

Shi

et al. 2022

Micromachines

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“…Recently, the reports of micro-Pirani gauges were mainly focused on using silicon as heater for a simple process and high compatibility with microfabrication technology. Whereas, it needs much longer thermal response time than 1 s for our previous micro-Pirani gauge based on a silicon structure [29]. The effects of pressure and current on the response time were tested, respectively [see Fig.…”

Section: ) Responsementioning

confidence: 99%

Single-Walled Carbon Nanotube Pirani Gauges Prepared by DEP Assembly

Zhang

2013

IEEE Trans. Nanotechnology

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This paper reports the design, fabrication, and characteristics of the single-walled carbon nanotubes (SWNTs) Pirani gauge fabricated by dielectrophoretic assembly first which requires simple equipments and process, costs little, and operates at room temperature without limitation on the materials of electrode and substrate. Its theory and design were described in detail. The characteristics were measured and analyzed systematically such as current-voltage, resistance-temperature, thermal response, resistance-pressure, and power consumption properties. The results show that this SWNTs Pirani gauge has rapid thermal response of milliseconds and can operate at very low power consumption down to 15 nW. It reveals a wide linear dynamic range from 0.8 to 80 000 Pa and high sensitivity about 8 kΩ/Pa on average.

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“…A hollow heater design has been developed that obtained a sensitivity of unit power consumption of 8.15 × 10 3 K/W/Torr (0.00187 V/W/Pa at current of 10 mA) in the pressure range of 0.2–200 Torr (26.6 to 2.66 × 10 4 Pa) with a power consumption of 127.59 μW [17]. A high aspect ratio design has helped improve the sensitivity of unit power consumption to 117 K/W/Pa (0.012 V/W/Pa) in the vacuum pressure range of 1–10 3 Pa with power consumption of less than 40 mW [18]. Another important method is micro-hotplate (MHP) technology, for which the sensitivity of a micro-Pirani vacuum sensor has reached 230 μV/Pa (0.02 V/W/Pa) in the vacuum pressure range of 1–10 2 Pa with power consumption of 4900 μW [19].…”

Section: Introductionmentioning

confidence: 99%

Highly Sensitive Diode-Based Micro-Pirani Vacuum Sensor with Low Power Consumption

Wei

Liu

et al. 2019

Sensors

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Micro-Pirani vacuum sensors usually operate at hundreds of microwatts, which limits their application in battery-powered sensor systems. This paper reports a diode-based, low power consumption micro-Pirani vacuum sensor that has high sensitivity. Optimizations to the micro-Pirani vacuum sensor were made regarding two aspects. On the one hand, a greater temperature coefficient was obtained without increasing power consumption by taking advantage of series diodes; on the other hand, the sensor structure and geometries were redesigned to enlarge temperature variation. After that, the sensor was fabricated and tested. Test results indicated that the dynamic vacuum pressure range of the sensor was from 10−1 to 104 Pa when the forward bias current was as low as 10 μA with a power consumption of 50 μW. Average sensitivity was up to 90 μV/Pa and the sensitivity of unit power consumption increased to 1.8 V/W/Pa. In addition, the sensor could also work at a greater forward bias current for better sensor performance.

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A single crystal silicon micro-Pirani vacuum gauge with high aspect ratio structure

Cited by 22 publications

References 11 publications

Overview of the MEMS Pirani Sensors

Overview of the MEMS Pirani Sensors

Single-Walled Carbon Nanotube Pirani Gauges Prepared by DEP Assembly

Highly Sensitive Diode-Based Micro-Pirani Vacuum Sensor with Low Power Consumption

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