A single-chip scanning probe microscope array

Olfat, M.; Strathearn, D.; Lee, G.; Sarkar, Niladri; Hung, S. C.; Mansour, Raafat R.

doi:10.1109/memsys.2017.7863634

Cited by 2 publications

(2 citation statements)

References 8 publications

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“…Nanometer tips, as core components of scanning probe microscopy (SPM) probes, field emission tips, microneedle arrays, etc., are widely used in material surface analysis, bio-engineering, high density data storage and micro-processing [ 1 , 2 , 3 , 4 , 5 , 6 , 7 , 8 , 9 , 10 , 11 , 12 , 13 ]. The height, aspect ratio, and radius of the tip are critical parameters which have a significant impact on the tip performance.…”

Section: Introductionmentioning

confidence: 99%

Batch Fabrication of Silicon Nanometer Tip Using Isotropic Inductively Coupled Plasma Etching

et al. 2020

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This work reports a batch fabrication process for silicon nanometer tip based on isotropic inductively coupled plasma (ICP) etching technology. The silicon tips with nanometer apex and small surface roughness are produced at wafer-level with good etching homogeneity and repeatability. An ICP etching routine is developed to make silicon tips with apex radius less than 5 nm, aspect ratio greater than 5 at a tip height of 200 nm, and tip height more than 10 μm, and high fabrication yield is achieved by mask compensation and precisely controlling lateral etch depth, which is significant for large-scale manufacturing.

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Section: Introductionmentioning

confidence: 99%

Batch Fabrication of Silicon Nanometer Tip Using Isotropic Inductively Coupled Plasma Etching

et al. 2020

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“…In last three decades, micro-cantilevers have attracted extensive attentions due to their various applications, such as the core component of scanning probe microscope (SPM), the micromachined IC probe cards [12][13][14], the electrothermally driven high-frequency probes [15,16], the probe arrays for large area scanning [17,18], and so on. Micro-cantilever probes have attracted extensive attentions due to their various applications, such as the core component of scanning probe microscope (SPM), data storage, and so on.…”

Section: Introductionmentioning

confidence: 99%

A novel scanning force microscopy probe with thermal-electrical actuation and piezo-resistive sensing

Liu

Wang

Zhu

et al. 2018

J. Micromech. Microeng.

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This work presents a novel scanning force microscopy probe with electro-thermal actuation and piezo-resistive detection. The fabricated probe of 270 × 58 × 2.5 μm3 can generate a force between 1.05 μN and 16.52 μN with a resolution of nano-newton, and can detect the nanometer-scale deflection. The minimum detectable output signal of the probe could be down to 20 μV and the sensitivity reaches 4.92 mV μm−1. This is a straight-forward technique for characterizing the mechanical properties of micro/nano-structures and devices.

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A single-chip scanning probe microscope array

Cited by 2 publications

References 8 publications

Batch Fabrication of Silicon Nanometer Tip Using Isotropic Inductively Coupled Plasma Etching

Batch Fabrication of Silicon Nanometer Tip Using Isotropic Inductively Coupled Plasma Etching

A novel scanning force microscopy probe with thermal-electrical actuation and piezo-resistive sensing

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