A single-beam probe method for roll angle measurement

Abstract

A simple common path polarization interferometer was proposed to measure a roll angle change by using a Zn-indiffused lithium niobate waveguide phase modulator for optical homodyne metrology. A phase retardation plate was used for a roll angle sensor. The phase delay between two orthogonal polarizations of a probe light is dependent on the angular displacements of the roll sensor.Experimental results have shown that the roll angle measurement resolution is 0.005° in a ±0.5° range.

A high-precision measurement of small roll angular displacements based on AOMs and its error impact analysis

“…Roll angular displacement is difficult to measure in the geometric error detection of numerical control (NC) machine tools due to the low resolutions of the conventional methods, whose sensitive directions are orthogonal to the plane of angular displacement [1]. To overcome that problem, many methods have previously been proposed, such as diffraction gratingsbased methods [1,2], polarization intensity variation methods [3][4][5], geometric relation transformation methods [6][7][8][9], collimator methods [10][11][12], polarization phase detection methods [13][14][15][16][17][18][19] and so on [20][21][22][23][24]. The polarization phase detection methods have been adopted by many researchers because of their advantages of having a simple structure and high resolution.…”