2006
DOI: 10.1088/0957-4484/17/9/056
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A simple procedure for fabricating molecular-sized gap junctions using conventional photolithography

Abstract: We describe a procedure for fabricating sub-5 nm gap junctions with sub-100 nm electrode-width using conventional photolithography. The fabrication procedure involves two photolithographic processes followed by shadow evaporation and electromigration. After lift-off following the second metal shadow evaporation, a nanoscale wire with a diameter less than 100 nm is fabricated along a sidewall of the second patterned photo-resist. The nanowire is cut by a milliamp current flow, then a sub-5 nm gap metal junction… Show more

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Cited by 6 publications
(9 citation statements)
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References 18 publications
(28 reference statements)
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“…For example, palladium wires may be grown between two photolithographically defined palladium electrodes as demonstrated by Cheng et al, resulting in single nanowires in well defined locations 4 . Another approach that yields single nanowires in precise locations is electrochemical growth or evaporation 5 along the sidewall of a photoresist pattern. Some assembly attempts include chemical patterning of a substrate to selectively promote/discourage adhesion 6 , contacting individual wires with precisely placed electrodes using a focused ion/electron beam deposition technique 7 , and generating dielectrophoretic forces on nanowires in solution 8,9 .…”
Section: Use As Transfer Printed Electrodesmentioning
confidence: 99%
See 1 more Smart Citation
“…For example, palladium wires may be grown between two photolithographically defined palladium electrodes as demonstrated by Cheng et al, resulting in single nanowires in well defined locations 4 . Another approach that yields single nanowires in precise locations is electrochemical growth or evaporation 5 along the sidewall of a photoresist pattern. Some assembly attempts include chemical patterning of a substrate to selectively promote/discourage adhesion 6 , contacting individual wires with precisely placed electrodes using a focused ion/electron beam deposition technique 7 , and generating dielectrophoretic forces on nanowires in solution 8,9 .…”
Section: Use As Transfer Printed Electrodesmentioning
confidence: 99%
“…4 Scaling parameters for both oxides with different AFM tips.. 57 Table 3. 5 Scaling parameters and Fourier amplitudes for both oxides… 62 Table 5.1 Surface free energy components for test liquids……………. 83 Table 5.…”
mentioning
confidence: 99%
“…Most of the above investigations involved nanoscale structures fabricated by electron-beam lithography (EBL). However, because EBL is expensive and time-consuming, a procedure that does not require the use of EBL is preferred for industrialization [7].…”
Section: Introductionmentioning
confidence: 99%
“…Such small islands are very difficult to fabricate even though conventional electron beam lithography technique is used. In this paper, we fabricated a SHT using nanometer-sized gap junctions by shadow evaporation method [4], and they showed room temperature SHT behaviors.…”
Section: Introductionmentioning
confidence: 99%