A Simple Ion Source for Monoenergetic Multiply Charged Ion Beams

Abstract

A b s t r a c t . A small and inexpensive electron beam ion source for multiply charged ions of noble gases is described. One of its essential characteristics is the low energy spread of the extracted ion beam, which depends on the charge state q of the ions and amounts to -q x 50 meV. The total ion current containing ionic states up to q = 6 is in the order of 10 nA. The design, construction and important parameters of the ion source are described.Eine einfachc Ionenquelle fur monoenergetische Biindcl mehrfach geladener Ionen I n h a 1 t s u b e r s i c h t. Wir beschreiben eine kleine und ohne groden Aufwand herstellbare Elek-tronenstoBquelle fur mehrfach geladene Ionen von Edelgasen. Eine ihrer hervorragendsten Eigenschaften ist die geringe Energiebreite des extrahierten Jonenbundels. Diese Energiebreite hLngt von der Ladungszahl q der Ionen ab und betragt etwa q x 50 meV. Der extrahierte Ionenstrom betragt etwa 10 nA und enthalt Ladungszustande bis zu q = 6. Funktion, Wirkungsweise und wichtige Betriebsparameter der Ionenyuelle werden beschrieben.

State-selective study of Ar2+, Ar3+and N22+formation by electron impact ionization near threshold

“…produced in an electron beam ion source (1) described elsewhere (Kahlert 1983, Kahlert et al 1985. The scheme of the source is shown in figure 2.…”

Optical properties of strained Si1–xGexand Si1–x–yGexCyheterostructures

“…After passing through a collision chamber which can be filled with a target gas the ions were analysed with respect to their kinetic energy in a double hemispherical analyser and finally detected with the aid of a channeltron. A more detailed description of the spectrometer and the ion source can be found elsewhere (Kahlert et al , 1985. Because of the unknown detection and extraction efficiency for the ions produced in the ion source the data have to be corrected and normalised to absolute values obtained by other authors.…”